MAN00000772_SI-G200BB_SVCPDFA.pdf - 第264页
HLGB-10313-01 Mount A ccuracy Calibration When the calculation re sult is 3Sigma < ±35[µm] and A vg < 10[µm], the c a talog SPEC (±50[µm] CPK > 1.0 or above) is satisfied.
HLGB-10313-01
Mount Accuracy Calibration
Click the OK button on the
confirmation window.
Press the [START] button on the
operation panel.
HLGB-10313-01
Mount Accuracy Calibration
When the calculation result is 3Sigma <
±35[µm] and Avg < 10[µm], the catalog SPEC
(±50[µm] CPK > 1.0 or above) is satisfied.
HLGB-10313-01
Mount Accuracy Calibration
[Batch recognition calibration]
“ ”
To execute the calibration for the rear head, select “1005C BatchTransCalibrationRear.PW4”.
Click in an order of AUTO menu
STATUS tab … button.
Select “
”, and
click the Select button.
In the Supply Position field, enter the supply
unit number on which you placed the cassette.
Click the NC Reset button on the
MOTION Setup (Unit) screen.