MAN00000772_SI-G200BB_SVCPDFA.pdf - 第415页
LAGB-10125-01 T ray Unit (OPTION)
LAGB-10124-01
Interface Panel
SUPPLIEDAIR
VACUUMPUMP
RELEASE
H/C
CASSETTEAIR
CASSETTEI/F
AIR
0.49MPa
TY-MLOUT
TY-ACOUT
TY-CTLOUT
LAGB-10125-01
Tray Unit (OPTION)
LAGB-10125-01
Tray Unit (OPTION)