SLM110S_TRM(Ver7.1_CS16.26) - 第87页
Page HANWHA TECHWIN 75 SLM110S Air Ass’y (2/6) A1 A2 B C3 C2 C1 Gantry Air Module Main Regulator Head Regulator Feeder Base Ionizer T ray Feeder Conveyor Right Sol. V alve Conveyor Left Sol. V alve 1 2 3 4 5 6 7 8 9 6 1 …

Page
HANWHA TECHWIN
74
SLM110S
Air Ass’y (1/6)
㜤
䍠⮹

Page
HANWHA TECHWIN
75
SLM110S
Air Ass’y (2/6)
A1
A2
B C3
C2
C1
Gantry Air Module
Main Regulator
Head Regulator
Feeder Base
Ionizer
Tray Feeder
Conveyor Right Sol. Valve
Conveyor Left Sol. Valve
1
2
3
4
5
6
7
8
9
6
1
2
1 1
2
2
3
4
5
6
6 7
9
8

Page
HANWHA TECHWIN
76
SLM110S
Air Ass’y (3/6)
B