The new PrexisionTM series Setting the global standards for displays - 第2页

2 I M P R OV E D S T A B I L I T Y A N D H I G H E R U P T I M E New se r v o bo ard with linea r moveme nt, simpl iﬁe d ele ctroni cs with bet ter pe rfo rman ce and mode rn bus struc ture provide supe rio r stabil ity …

The new Prexision

series

Setting the global

standards for displays

IMPROVED STABILITY AND HIGHER UPTIME

New servo board with linear movement, simpliﬁed

electronics with better performance and modern

bus structure provide superior stability and better

error handling to create higher system uptime.

SUPPORT FOR HIGHER LEVEL OF FACTORY

AUTOMATION WITH VARIOUS LOADER SOLUTION

Newly developed PLS (Pre Loading System) and

interface supporting communication from factory

automation system to minimize human interface in

order to reduce contamination and human error.

The new generation Prexision series are built on the Evo control platform.

Updated with new, innovative software and hardware architecture,

it’s been designed for the future of production automation, advanced

connectivity and big data applications.

Prexision Evo series

Remarkable precision for

all the world’s displays

BETTER SUPPORT FOR LOGGING, CONNECTIVITY

AND BIG DATA APPLICATIONS

New servo board log all motions in system which can

be analyzed and used for many dierent purpose,

enabling stable system operation and extension to

big data applications.

EXTENDABLE WITH NEW FUNCTIONALITY

Build on completely new modern hardware and

software architecture for possibility to develop new

functions in the future meeting customers’ demand.

4 5

Prexision 800 Evo is the most advanced mask writer

when it comes to ecient production of top critical

photomask manufacturing for cutting-edge displays

such as AMOLED and foldable displays for ﬂagship

smartphones.

Beneﬁts of the Prexision 800 Evo

• 25% increase resolution with custom made

ﬁnal lens

• 3 times better lens and mirror quality with

stress free optic mounter

• More multi beams to maintain throughput

even with smaller pixels

• HT mode specs similar with Prexision 80 Evo

HA mode

• New improved software algorithm to

compensate uneven beam performance

2X better CD uniformity performance compared

to Prexision 80 Evo. Prexision 800 Evo is perfect

for deﬁning small enough feature size with good

quality, such as OPC (Optical Correction Proximity)

on photomasks that are required for the most

advanced display manufacturing, as well as support

for future R&D.

Prexision 800 Evo

The new resolution standard for top critical

photomask manufacturing

Prexision 80 Evo

Prexision 80 is known for overcoming the challenge

of the “invisible Mura” for advanced AMOLED

displays for smartphones. With the Evo control

platform, the Prexision 80 Evo is more robust and

stable than ever which is perfect for critical photo-

masks manufacturing used for high resolution

LCDs and mid to advanced AMOLED displays.

Key highlights

• Software algorithm to compensate uneven

beam performance

• 2X better CD Uniformity performance

compared to Prexision 8 Evo/Prexision 10

• Z-correction as a standard function

Prexision 80 Evo

Higher yield for high resolution advanced

LCD and AMOLED displays

KEY SPECIFICATIONS

HA mode HT mode

Minimum lines and spaces (pitch/2) 0.55 m 0.85 m

Constituent CD uniformity (3σ) 10 nm 15 nm

CD linearity 1.0-10 um (p-p) 50 nm 85 nm

Local placement (3σ) 30 nm 50 nm

Written registration (3σ) 125 nm 175 nm

Written overlay (3σ) 40 nm 50 nm

Mask set overlay (3σ) 75 nm 100 nm

KEY SPECIFICATIONS

HA mode HT mode

Minimum lines and spaces (pitch/2) 0.75 m 1.0 m

Constituent CD uniformity (3σ) 15 nm 25 nm

CD linearity 1.5-10 um (p-p) 50 nm 85 nm

Local placement (3σ) 30 nm 50 nm

Written registration (3σ) 150 nm 200 nm

Written overlay (3σ) 50 nm 70 nm

Mask set overlay (3σ) 75 nm 100 nm