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AP -1000 Robust Plasm a Treat ment Syst em Features and Ben efit s  PLC cont rolle r with touch screen provides an intuit ive g raphical inter face and re al time p rocess rep resentat ion  Flexible sh elf a rchitect u…

AP-1000

Robust Plasma Treatment System

Features and Benefits

 PLC controller with touch screen

provides an intuitive graphical interface

and real time process representation

 Flexible shelf architecture allows

processing of a wide variety of part

carriers in either direct or downstream

plasma mode

 13.56 MHz RF generator has automatic

impedance matching for unparalleled

process reproducibility

 Proprietary software control system

generates process and production data

for statistical process control

Uniform plasma treatment for the most

demanding production environments

The Nordson MARCH AP-1000 Plasma System is

designed to meet the rigorous demands of 24-hour

operation in high performance manufacturing

environments. The system delivers uniform plasma

treatment with unmatched reliability, safety and ease

of operation.

The AP-1000 platform is completely self-contained,

requiring minimal floor space. The pump, chamber,

control electronics, and 13.56 MHz RF generator are

housed in a single enclosure. Full front access allows

for convenient access to all interior components. The

pump is positioned on rollers for easy removal.

The plasma chamber is constructed of 11-gauge

stainless steel with aluminum fixtures for superior

durability. The chamber has multiple removable and

adjustable shelves to accommodate a range of part

carriers, including magazines, trays, wafer and Auer

boats.

Enhanced productivity for high-volume

capacity requirements

The AP-1000 Plasma System with optional HTP

(high throughput) shelves combines the reliability and

process quality of the AP-1000 system with the

proven benefits of Nordson MARCH’s unique shelf

design. The AP-1000 HTP optimizes use of the

reactive ions found in RF plasma, increasing

treatment uniformity while decreasing process time.

The AP-1000 HTP system allows selection from a

range of process gases such as Argon, Hydrogen and

Helium. It comes standard equipped with four mass

flow controllers for optimal gas control. Slotted

magazines are placed vertically inside the chamber.

Additionally, slotted magazines can be placed

vertically inside the chamber. Typically, each

magazine holds a minimum of 20 lead frames. The

AP-1000 plasma chamber can hold up to 12

magazines, depending on magazine size.

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Specifications: AP-1000 Plasma System

Enclosure

Dimensions

W x D x H – Footprint

680W x 1127D x 1536H mm – 1890H mm w/light tower

(26.77W x 62.3D x 56.5H in – 74.4H in w/ light tower)

Net Weight

485kg (1070lbs)

Effective Footprint – Clearances

Right, Left – 153 mm (6 in), Front – 680 mm (26.8 in)

Back – 483 mm (19 in) minimum

Chamber

Dimensions

457W x 610D x 457H mm (18W x 24D x 18H in)

Volume

127 liters (7776 in³)

Variable Electrode Configurations

Direct, Downstream, HTP Wide, HTP Narrow

Number of Shelf Positions

Shelf Pitch

25.4mm (1 in) for 600W

50.8mm (2 in) for 1000 W

Electrodes

Powered Electrode Dimensions -

Working Area

349W x 425D mm (13.74 W x 16.73D in)

Ground (Perf.) Electrode

Dimensions – Working Area

384W x 425D mm (15.1W x 16.73D in)

Floating Shelf Dimensions –

Working Area

349W x 425D mm (13.74W x 16.73D in)

RF Power

Standard Wattage

600W

Frequency

13.56 MHz

Gas Control

Maximum Number of MFCs

Remote

Interface

Software Controls

PlasmaLINK, ProcessLINK

Vacuum

Pump

Standard Vacuum Pump

50 CFM (50/60Hz) wet pump with oil mist eliminator

Facilities

Power Supply

220V, 25A, 50/60 Hz, 3-Phase, 8AWG, 4-Wire

380V, 25A, 50/60Hz, 3-Pahse, 8 AWG, 5-Wire

Process Gas Fitting Size & Type

.25-in. OD Swagelok Tube

Purity

Industrial grade or better

Pressure & Flow

Regulated from .69bar (10PSI) min. to 1bar (15PSI) max.

Purge Gas Fitting Size & Type

.25-in. OD Swagelok Tube

Purity

Industrial grade Nitrogen or CDA

Pressure & Flow

Regulated from 2bar (30PSI) min. to 5.5bar (80PSI) max.

Pneumatic Valves Fitting Size &

Type

.25-in. OD Swagelok Tube

Purity

CDA, Oil Free, Dewpoint <=7°C /45°F, Particulate Size <5

micron

Pressure & Flow

Regulated from 3.4bar (50PSI) min. to 5.5bar (80PSI) max.

Exhaust

38mm (1.5 in.) OD Pipe Flange

Compliance

SEMI

S2, S8, E10, Cleanroom

International

CE marked

Ancillary

Equipment

Gas Generators

Nitrogen, Hydrogen

Facilities Modules

Oil Filtration, Chiller, Scrubber

Shipping

Crate Dimensions

1520W x 1490L x 1850H mm (60W x 59L x 73H in.)

Gross Weight

641kg (1390lbs)

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Dimensions: AP-1000 Plasma System

Front View of AP-1000 Plasma System

Side View of AP-1000 Plasma System

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