444CEMM1 - 第128页
Page 1-66 OFF ( ) ON ( ) SERVO 444C-E-MMA01-A08-01 Check Every 560 Hours (Once a Month) 10. T urn OFF the servo switch. 11 . Open the safety cover . 12. Detach the nozzle located at the posi- tion selected in steps 8 and…
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REGULAR
MAINTENANCE
1
444C-E-MMA01-A08-03
Check Every 560 Hours (Once a Month)
Select the nozzle position to be measured, and measure.
(Here we start with position 1 as an example.)
8. Turn OFF the vacuum for the nozzle
position that will not be measured
and pos1 to pos6 of the facing head.
∗ Press
UNLOCK
+ for pos 2 to 6.
∗ One vacuum pump is shared with AF and AR,
and another is shared with BF and BR.
9. Lower the nozzle of the position to be
measured.
∗ Press
UNLOCK
+ for pos 1.
∗ The screen at the left shows the setting when
the preparation for measuring at nozzle
position 1 is over.
To the next page
Vacuum
ON
Nzl Extend
OFF
Page 1-66
OFF ( )
ON ( )
SERVO
444C-E-MMA01-A08-01
Check Every 560 Hours (Once a Month)
10. Turn OFF the servo switch.
11. Open the safety cover.
12. Detach the nozzle located at the posi-
tion selected in steps 8 and 9, and
then set the vacuum gauge to the
nozzle holder tip.
∗ If you take a measurement with a nozzle
attached, a vacuum can leak from the joint of
its reflector; therefore, a correct value may not
be measured.
(The vacuum gauge shown on the left is an
example. It is not an attachment.)
13. Check the vacuum pressure.
∗ Ensure that the vacuum pressure is over 80.0
kPa.
The vacuum pressure is not over 80.0 kPa
Check the following items. Inform us if there is no trouble.
1. Checking air leakage in the vacuum pass
• Ensure that no break in the pass. (no sound of air leakage)
2. Checking trouble in the vacuum pump
• Check for strange noise from the vacuum pump.
• Check for waste of parts.
• Check the vacuum pressure of the vacuum pump by the gauge attached to the pump.
14. Take off the vacuum gauge.
15. Close the safety cover.
16. Turn ON the servo switch.
OFF ( )
ON ( )
SERVO
444C-520P
To the next page
Page 1-67
REGULAR
MAINTENANCE
1
444C-E-MMA01-A08-02
Check Every 560 Hours (Once a Month)
17. Raise the nozzle which has been
measured.
∗ Press
UNLOCK
+ for pos 1.
18. Turn OFF the vacuum for the nozzle
position which has been measured.
∗ Press
UNLOCK
+ for pos 1.
Measure the nozzle at other position.
(Here we describe position 2 as an example.)
19. Turn ON the nozzle position to be
measured.
∗ Press
UNLOCK
+ for pos 2.
20. Lower the nozzle at the position to be
measured.
∗ Press
UNLOCK
+ for pos 2.
After it, repeat steps 10 to 20, and check the vacuum pressure at all nozzle positions.
Vacuum
OFF
Vacuum
ON
Nzl Extend
ON
2
1
1
2
Nzl Extend
OFF