icube_mpl_e - 第9页
Maintenance Parts 7 Nozzle Changer / 4M 3 1 2 No. Part No. Part Name Q 'ty Remarks Rank 1 KM1-M9605-03X CYL.,CLAMP 1 B 2 KM1-M9611-03X CYL.,U/D 1 B 3 KH5-M655A-A1X SENSOR,1-1 15 B JUL./2003
6
Maintenance Parts
Nozzle / 4M
Nozzle / FF , SS
(For SS,FF Head)
4
5
6
7
3
8
A66epyTA36epyTA26epyTA16epyT Type64A Type65A
1
2
5
6
1
3
4
Type71A
(For 4M Head)
Type72A Type73A Type76A Type77A
2
No. Part No. Part Name Q'ty Remarks Rank
1 KV8-M7710-A1X NOZZLE 71A ASSY. 1 A
2 KV8-M7720-A1X NOZZLE 72A ASSY. 1 A
3 KV8-M7730-00X NOZZLE 73A 1 A
4 KV8-M7760-00X NOZZLE 76A 1 A
5 KV8-M7770-A0X NOZZLE 77A ASSY. 1 A
6 90990-17J013 O-RING 1 A
No. Part No. Part Name Q'ty Remarks Rank
1 KV7-M7710-A1X NOZZLE 61A ASSY. 1 A
2 KV7-M7720-A1X NOZZLE 62A ASSY. 1 A
3 KV7-M7730-00X NOZZLE 63A 1 A
4 KV7-M7740-A0X NOZZLE 64A ASSY. 1 A
5 90990-17J013 O-RING 1 A
6 KV7-M7750-A0X NOZZLE 65A ASSY. 1 A
7 90990-17J015 O-RING 1 A
8 KV7-M7760-00X NOZZLE 66A 1 A
Maintenance Parts
7
Nozzle Changer / 4M
3
1
2
No. Part No. Part Name Q'ty Remarks Rank
1 KM1-M9605-03X CYL.,CLAMP 1 B
2 KM1-M9611-03X CYL.,U/D 1 B
3 KH5-M655A-A1X SENSOR,1-1 15 B
JUL./2003
Maintenance Parts
8
Nozzle Changer / FF, SS
No. Part No. Part Name Q'ty Remarks Rank
1 KV7-M9612-00X AIR CYLINDER ASSY. 1 B
2 KH5-M655A-A1X SENSOR,1-1 12 B
2
1
JUL./2003