3_AVS-V2_MCT-UM-internal_EN_07-2019 - 第131页

ASM AVS - U SER M ANUAL P AGE 131 OF 182 5.3.2.7.1 S ettings Wit h set tin gs it is po ssibl e to tu rn on an d of f th e sup port li nes fo r t he grap hica l v iew Thi s is ava ilab le for a ll g raphs ex cept the re g…

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ASM AVS - USER MANUAL
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5.3.2.7 »Current Results« – »Single value«
The tables shown in »Single value« view, are resulting from the settings on the left side of the
window. See also 4.3.2.3 »Current Results«, selecting the result display.
Only at the »Single value« view, more than one graph can be displayed in one picture at once.
See therefore 4.3.2.3.
CAUTION
It is not possible to display graphs together which have different specification limits (nominal values). e.g.
X- and Y- axis can not be shown together with the angle graph.
The indication of the specification limits is hanging on the “Item”.
Therefore it is possible to evaluate different “Items” with different spec. limits.
Sigma limits show, at which offset value the given accuracy class will be achieved by the actual
result.
Accuracy Class, see 4.3.2.6, 4.3.1, respectively 4.2.6.1.2
In the example above, in the minus direction, the required 4 Sigma (cmk=1,33) is only achieved
at approx. -73µm for the X-axis (blue graph), as well as at approx. -77µm for the Y-axis (yellow
graph). But the required specification limit is, however, 67µm (red line).
Regression lines show the mean value trend of the result.
NOTICE
More details about reading the results, see 6.4 Notes on the statistics and on the interpretation of the
results.
Graph 1, e.g. X Offset.
Regression line
(Trend)
Sigma limit
Specification limits
(Nominal value)
Support lines can be
turned on/off .
ASM AVS - USER MANUAL
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5.3.2.7.1 Settings
With settings it is possible to turn on and off the
support lines for the graphical view
This is available for all graphs except
the regression line. The regression line
is only available at single value graph.
5.3.2.8 »Current Results« – »X-Y-Plot«
The tables shown in »X-Y-Plot« view, are resulting from the settings on the left side of the
window
See also 4.3.2.3 »Current Results«, selecting the result display
This view shows the result of X- and Y-axis together in one graph
The same principles apply for evaluating the chart and in respect of the meanings of the auxil-
iary lines as for the "Single Value Chart".
Sigma limit
Specification limits (Nom-
inal value)
ASM AVS - USER MANUAL
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5.3.2.9 »Current Results« – »Frequency«
The tables shown in »Frequency« view, are resulting from the settings on the left side of the
window
See also 4.3.2.3 »Current Results«, selecting the result display
With the view of »Frequency« the »bell-shaped curve« (normal distribution) can be shown.
(Gauss)
As a fundamental principle:
• The narrower and higher the bell curve, the better the result.
• The curve should ideally be centered on zero.
The same principles apply in respect of the meanings of the auxiliary lines as for the "Single
Value Chart".
Sigma limits
Bell-shaped curve
(Normal distribution)
Specification limits
(Nominal value)
Numbers measuring points
(here in 10µm steps)
Mean value
(Mean)