SP28P-DH - 第121页
31 KXF09WWAA00 PH-SENSOR PM2-LL10-C1 1 A 32 1956C281330 CABLE-BEAR 340.050-075-13-3050.12PZ 1 33 KXF07B2AA00 PH-SENSOR PM-T53-C1 2 A 34 KXF02UPAA00 SPEED-CONTROLLER AS1201F-M5-04S 2 35 KXF09W2AA00 BOLT Hexagon socket cou…
31 KXF09WWAA00 PH-SENSOR PM2-LL10-C1 1 A
32 1956C281330 CABLE-BEAR 340.050-075-13-3050.12PZ 1
33 KXF07B2AA00 PH-SENSOR PM-T53-C1 2 A
34 KXF02UPAA00 SPEED-CONTROLLER AS1201F-M5-04S 2
35 KXF09W2AA00 BOLT Hexagon socket countersunk head bolt M8×25L 4
36 KXF0A7CAA00 SPACER ASB-560 2
37 KXF0277AA00 FLOATING-JOINT JA15-5-080 1
38 KXF0A75AA00 GRIP GRM8 1
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40 KXF05MMAA00 WASHER SSWA13-3.0 1
41 KXF0A7EAA00 RUBBER-LEG C-30-RK-18 1
42 KXF04RJAA00 BOLT Hexagon socket head cap screw M4×50L 2
43 KXF0B63AA00 WASHER WSSB16-12-1 1
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NO
番号
ＭＯ機番
ユニット名称
ﾏｽｸｸﾘｰﾆﾝｸﾞﾕﾆｯﾄ:SP28P-DH
UNIT NAME
PART NUMBER
品番 部品名 型式 数量 ﾗﾝｸ 備考
Mask cleaning unit:SP28P-DH
PART LIST
MODULE NUMBER
パーツリスト
1956C2M0000
10-C
UNIT NUMBER
ユニットＮｏ.
PART NAME TYPE Q'TY RANK REMARKS
− −96 09 0002−（ ）
