DEK高级培训资料 - 第180页
Benchmark test • Run QC-Calc softwa re package in real time • Run machine for 10 0 cycles Issue 2: July 2007 • Run machine for 10 0 cycles • Record SPC results Objective 32: Run benchmark test and re cord results in your…
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DATA OUTPUT RATE EVERY CYCLE
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START RATE 1
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SAMPLE RATE 0
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Benchmark Tests -
Parameter Settings
Issue 2: July 2007
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START RATE LIMIT 0
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SPC DATA MODE DISC
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SPC FORMAT WINDOWS
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UPDATE ON START UP YES
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ALIGN INSPECT MODE POST
Benchmark test
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Run QC-Calc software package in
real time
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Run machine for 100 cycles
Issue 2: July 2007
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Run machine for 100 cycles
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Record SPC results
Objective 32: Run benchmark test and record results in your workbook
Our goal
Target:
Galaxy 2CPK@12.5microns
Europa 2CPK@20microns
Inf Api 2CPK@25microns
Issue 2: July 2007
Hoz 01i
2CPK@25microns
Hoz 02i 1.6CPK@25microns
Hoz 03i 1.3CPK@25microns