1G4C-E-MP1-4

㪈㪈㪄㪘 䊙䉴䉪䉪䊥䊷䊆䊮䉫 䊡䊆䉾䊃 㩿㪣㪀 M ask C lea nin g Un it(L ) 䊌䊷䉿䊧䉟䉝䉡䊃 Kit N o . 䉨䉾䊃ຠ ⇟ Kit Na me 䉨䉾䊃ฬ⒓ KXF X03BUA00 䍜䍖䍚䍌䍻㪥㫆㪅 PARTS LAYOUT Section No.   M75 --:(:$7#

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㪈㪈㪄㪘
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䊌䊷䉿䊧䉟䉝䉡䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LAYOUT
Section No.
M75
--:(:$7#
Ref
No.
Remarks
R
1
Q'ty
㪈㪈㪄㪘
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䍐䍵䍛䍢
㪥㫆㪅
Part No.
ຠ䇭䇭ฬຠ⇟ ᢙ㊂
R
2
䊌䊷䉿䊥䉴䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
Part Name
஻䇭䇭䇭⠨
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LIST
Section No.
R
3
STAND
2
1 KXFB034GA00
GUIDE
2
10 KXFB07VSA00
BLOCK
1
11 KXFB034PB01
BAR
1
12 N210002144AA
PLATE
1
13 N210007861AA
PLATE
1
14 KXFB034SC02
BLOCK
1
21 N210002139AA
BAR
3
24 KXFB08YZA01
PLATE
1
25 KXFB035TA00
BRACKET
7
26 KXFB0056A00
BRACKET
2
27 KXFB002MA00
BRACKET
2
28 KXFB00JJA01
DOG
1
29 KXFB035UB00
BRACKET
1
30 N210014274AA
MOTOR
1
31 KXF0DWTBA00
S
2RK6GN-AWMJ
GEAR-HEAD
1
32 KXF0DWTCA00 2GN120K
BOLT
4
33 N510017374AA
Hexagon socket head cap screw M4X55-10.9 A2J (Trivalent)
TORQUE-LIMITER
1
34 KXF0DX12A00 OTLC8-2000C
PIN
1
35 KXF07X4AA00 SPP1.6-16
BEARING
1
36 KXF03G2AA00 SFB48-12
PIN
6
43 KXF02XXAA00 MS3-15
SENSOR
3
44 KXF07B2AA00
A
PM-T53-C1
LINEAR-WAY
2
45 N510019505AA LWL12C1R100BCSS1EG39
WASHER
1
46 KXF09UWAA00 WSSB16-8-2
PIPE
1
48 KXF0E0WJA00 PIPD16-609
BOLT
4
50 KXF0E071A00 WA Socket SP-TYPE M6X16L(Unichrome)
SPACER
2
51 N510020196AA CB-310E
M76
--:(:$7#
㪈㪈㪄㪙
䊙䉴䉪䉪䊥䊷䊆䊮䉫䊡䊆䉾䊃㩿㪣㪀
Mask Cleaning Unit(L)
䊌䊷䉿䊧䉟䉝䉡䊃
Kit N
o
.
䉨䉾䊃ຠ
⇟
Kit Name
䉨䉾䊃ฬ⒓
KXFX03BUA00
䍜䍖䍚䍌䍻㪥㫆㪅
PARTS LAYOUT
Section No.
M77
--:(:$7#