00192553-01.pdf - 第268页
± ± ± Å 5(7851 Å …

Å (6&
!
!
Marke-Nr. = 8 Qualität = 70Marke testen
testen
1..6 : x/y-Schritt.
Ret :
x/y - Schrittw. = ...
: x-Achse +
: x-Achse -
: y-Achse +
: y-Achse -

±
±
±
Å 5(7851
Å

;<
±
±
Å
Å (6&
: x-Achse +
: x-Achse -
: y-Achse +
: y-Achse -
1..6: x/y-Schritt.
x-Pos. [µm]= .......... y-Pos. [µm]= .........
x/y-Achsen verfahren
x/y - Schrittw. =
;<