00192553-01.pdf - 第270页
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: x-Achse +
: x-Achse -
: y-Achse +
: y-Achse -
1..6: x/y-Schritt.
x-Pos. [µm]= .......... y-Pos. [µm]= .........
x/y-Achsen verfahren
x/y - Schrittw. =
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