The new SLXTM series Built for a smarter digital future - 第5页

AD11 205 re v A / May 20 20 Mycronic, Pr exision, LRS, FPS, MMS, Sigma and Omega are r egistered trademarks or trademarks of Mycr onic AB. Mycronic AB is ISO 9001:2015 and ISO 14001:2015 certified. Mycronic’ s Prexision l…

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WIDE RANGE OF CONFIGURATION OFFERING
Dierent customers have dierent technical require-
ments depending on applications and production
mix. The SLX series oers three dierent base models
which can be further customized, adding a wide
range of options.
• SLX 1: the fastest model delivers utmost
productivity for lower-end semiconductor nodes
• SLX 2: a well-balanced model for users who aim
for both productivity and higher semiconductor
nodes
• SLX 3: the most advanced model, addressable
up to around 90 nm node
MODERN DATAPATH MANAGEMENT
One of the critical areas the mature semiconductor
market is to have fast, stable and reliable pattern
data management design, since the pattern density
continues to increase at the same time it requires
more compensation. The SLX series modern scal-
able datapath architecture handles all these aspects
by having the same architecture as our state-of-the-
art display mask writers that has been continuously
developed over time. All critical processing is done
oine, leaving only the data transfer step online to
minimize the chance of errors during exposure.
6 7
* Estimate exposure time with XT mode for 6” mask with
area 150 mm x 150 mm
SLX 1 e1
SLX 2 e1
SLX 3 e1
KEY SPECIFICATIONS
3 PASS 2 PASS 1 PASS
Writing speed* ~169 mins ~113 mins ~56 mins
Minimum Line Width 400 nm 400 nm 400 nm
CD uniformity (3σ) 10 nm 12 nm 20 nm
Registration (3σ) 20 nm 25 nm 30 nm
2
nd
layer alignment (mean + 3σ) 30 nm 45 nm 60 nm
Laser wavelength 266 nm
KEY SPECIFICATIONS
3 PASS 2 PASS 1 PASS
Writing speed* ~90 mins ~60 mins ~30 mins
Minimum Line Width 500 nm 500 nm 550 nm
CD uniformity (3σ) 12 nm 15 nm 20 nm
Registration (3σ) 20 nm 25 nm 30 nm
2
nd
layer alignment (mean + 3σ) 45 nm 50 nm 60 nm
Laser wavelength 404 nm
KEY SPECIFICATIONS
2 PASS 1 PASS
Writing speed* ~40 mins ~20 mins
Minimum Line Width 700 nm 700 nm
CD uniformity (3σ) 25 nm 35 nm
Registration (3σ) 30 nm 40 nm
2
nd
layer alignment (mean + 3σ) 60 nm 100 nm
Laser wavelength 404 nm
SHARED PLATFORM TECHNOLOGY FOR
ULTIMATE SYSTEM RELIABILITY
SLX series are built on Evo control platform which
is also used for other Mycronic’s mask writers.
All movement in the Evo control platform are
controlled by a new servo board called MCMC
(Multi Channel Motion Control) that enables real-
time compensation to minimize deviation. The result
is great stability and accuracy – something that’s
already been proven in the fi eld.
The MCMC servo board also comes with great log-
ging capability, ready to log all motions within the
system during exposure with high sampling rate.
The log can be analyzed and used for system
trending, preventive maintenance and much more,
enabling stable system operation and extension to
big data applications. Adding to that, the user can
customize the machine to further improve system
performance and enhance usability to widen the
addressable applications.
The SLX series, with superior
writing speed and modern data
path management, it’s made
to rewrite the standard of high-
volume production
AD11205 rev A / May 2020
Mycronic, Prexision, LRS, FPS, MMS, Sigma and Omega are registered trademarks or
trademarks of Mycronic AB. Mycronic AB is ISO 9001:2015 and ISO 14001:2015 certified.
Mycronic’s Prexision laser pattern generators are protected by several patents including, but not limited to, the following patents:
US Patents No. 5 495 279, US 5 517 349, US 5 635 976, US 6 448 999, US 6 529 266, US 6 624 878, US 6 700 600, US 6 844 123,
US 6 883 158, US 7 148 971, US 7 709 165, US 7 912 671, US 7 919 218, US 8 137 875 and Chinese Patents No. CN 00807832.7, ZL00814427.3,
ZL200480031019.7, CN 101194208, CN 102037312, and other corresponding national patents and patent applications pending.
SOUTH KOREA
Mycronic Co. Ltd.
3rd Floor, Jung-San
Bldg. 1026-8
Sanbon-Dong, Gunpo-Si
Gyeonggi-Do, 15808
South Korea
Tel: +82 31 387 5111
USA
Mycronic Inc.
554 Clark Road
Tewksbury, MA 01876
USA
Tel:+1 978 667 9449
mycronic.com
SWEDEN
Mycronic AB
PO Box 3141
Nytorpsvägen 9
SE-183 03 Täby
Sweden
Tel: +46 8 638 52 00
CHINA
Mycronic Co., Ltd
Unit 106, E Block
Lane 168, Da Duhe Road.
Putuo District, 200062
Shanghai P.R. China
Tel: +86 21 3252 3785/86
JAPAN
Mycronic Technologies KK
Chofu Center Bldg.
1-18-1 Chofugaoka, Chofu-shi
Tokyo 182-0021
Japan
Tel: +81 42 433 9400