00197042-04_SM_X-Serie-S_Customer_EN - 第158页
6 Gantries 6.3 X and Y axis 158 Service Manual SIPLACE X-Serie S 06/2019 Fig.197: Operation of test device PG-U - 4
6 Gantries
6.3 X and Y axis
Service Manual SIPLACE X-Serie S 06/2019 157
Fig.195: Operation of test device PG-U - 2
Fig.196: Operation of test device PG-U - 3
6 Gantries
6.3 X and Y axis
158 Service Manual SIPLACE X-Serie S 06/2019
Fig.197: Operation of test device PG-U - 4
6 Gantries
6.3 X and Y axis
Service Manual SIPLACE X-Serie S 06/2019 159
6.3.9 Replacing the Y Axis Buffer (SIPLACE Service only)
NOTICE
SIPLACE Service
This task may only be performed by SIPLACE service technicians.
6.3.10 Replacing the X Scale (SIPLACE Service only)
NOTICE
SIPLACE Service
This task may only be performed by SIPLACE service technicians.
6.3.11 Replacing the Y Scale (SIPLACE Service only)
NOTICE
SIPLACE Service
This task may only be performed by SIPLACE service technicians.