P-215-001e - 第88页
MODEL TIM-X100F/R 01 12-001 86 ヘッド部 R HEAD SECTION R Fig. MC-6 真空センサ V acuum Pump Fig.MC-6 TIM-X100 See Fig.C-3 Key No.202 See Fig.C-3 Key No.224 See Fig.MC-3 Key No.201 525 520 524 521 522 525 523 547 548 546 519
MODEL TIM-X100F/R
0302-002
85
Key No. PART No. PART NAME Q’ty REMARKS
NOTE
MC-5
401 630 094 1630 SENSOR,PHOTO 1 -BPH025T,-BPH025R 750MC-210-401
402 630 094 1647 BRACKET 1 750MC-210-402
403 630 098 3258 BEARING,RADIAL 2 750MC-210-403
404 630 118 2094 LEVER 1 750MC-210-404
405 630 007 1740 BEARING,RADIAL 1 750MC-210-405
406 630 114 3750 PIN,HINGE 1 750MC-210-406
407 630 094 1692 CAM 1 750MC-210-407
408 630 114 3736 LEVER 1 750MC-210-408
409 630 002 3190 SPRING,TENSION 1 750MC-210-409
410 616 900 0172 RING E 1 1 750MC-210-410
412 630 071 7716 SENSOR,PELEC 1 -BPH024 750MC-210-412
413 630 099 5534 BRACKET 1 750MC-210-413
414 630 094 7472 BRACKET 1 750MC-210-414
415 630 098 7034 BRACKET 1 750MC-210-415
416 630 097 6267 BRACKET 1 750MC-210-416
417 630 105 6968 NAME PLATE,PARTS 1 750MC-210-417
418 630 109 5059 BRACKET 1 750MC-210-418
429 411 183 7104 SCR PAN 2X8 4 750MC-210-126
430 630 069 0644 BOLT 2 750MC-210-104
435 411 141 5807 WASHER F 3X6X0.5 4 750MC-210-435
436 411 141 3902 WASHER V 3X7X0.5 2 750MC-210-436
437 411 141 2806 WASHER SPR 3 6 750MC-210-437
438 630 000 7503 BOLT,HEX-SCT 2 750MC-210-438
439 630 000 7510 BOLT,HEX-SCT 2 750MC-210-439
440 630 000 7527 BOLT,HEX-SCT 2 750MC-210-440
443 630 106 5625 BOLT,HEX-SCT 1 750MC-210-443
444 630 008 3057 BOLT,HEX-SCT 2 750MC-210-444
445 411 039 2604 SCR PAN 2X6 2 750MC-210-445
449 630 114 3743 COLLAR 1 750MC-210-449
MODEL TIM-X100F/R
0112-001
86
ヘッド部 R HEAD SECTION R
Fig. MC-6 真空センサ Vacuum Pump
Fig.MC-6
TIM-X100
See Fig.C-3
Key No.202
See Fig.C-3
Key No.224
See Fig.MC-3
Key No.201
525
520
524
521
522
525
523
547
548
546
519
MODEL TIM-X100F/R
0112-001
87
Key No. PART No. PART NAME Q’ty REMARKS
NOTE
MC-6
519 630 112 3158 SWITCH,PRESSURE 1 -SVS121 750MC-210-419
520 630 111 6679 BLOCK 1 750MC-210-420
521 630 111 6662 COLLAR 1 750MC-210-421
522 630 113 0781 BOLT 1 750MC-210-422
523 630 112 3134 BRACKET 1 750MC-210-423
524 630 053 4900 SEAL 1 750MC-210-424
525 630 112 8382 SWITCH,PRESSURE 1 750MC-210-425
546 630 000 7503 BOLT,HEX-SCT 2 750MC-210-446
547 411 141 3902 WASHER V 3X7X0.5 2 750MC-210-447
548 411 141 2806 WASHER SPR 3 2 750MC-210-448