SOM-2079-001_w.pdf - 第102页
99 SOM-2079 1005-001 6.7 基板認識 Table 9 異常 ID 異常名、説明、要因および復帰方法 460101 PEC Inspection PEC Mark #1 (Global) ----- 460102 PEC Inspection PEC Mark #2 (Global) ----- 460103 PEC Inspection PEC Mark #3 (Global) ----- 460104 PEC I…
98
SOM-2079
1005-001
6.6 認識通信
Table 8
異常 ID 異常名、説明、要因および復帰方法
450101 Recog Comm. Error
Recognition Error Code.
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450102 Recog Comm. Error
Time-Out Error
Turn off the machine by pressing the emergency stop and after restarting it,
perform the zeroing operation.
450103 Recog Comm. Error
GUI starting failure.
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6.6 認識通信
99
SOM-2079
1005-001
6.7 基板認識
Table 9
異常 ID 異常名、説明、要因および復帰方法
460101 PEC Inspection
PEC Mark #1 (Global)
-----
460102 PEC Inspection
PEC Mark #2 (Global)
-----
460103 PEC Inspection
PEC Mark #3 (Global)
-----
460104 PEC Inspection
PEC Mark #1 (Image)
-----
460105 PEC Inspection
PEC Mark #2 (Image)
-----
460106 PEC Inspection
PEC Mark #3 (Image)
-----
460107 PEC Inspection
PEC Mark #1 (Local)
-----
460108 PEC Inspection
PEC Mark #2 (Local)
-----
460109 PEC Inspection
PEC Mark #3 (Local)
-----
46010a PEC Inspection
Land PEC Mark #1
-----
46010b PEC Inspection
Land PEC Mark #2
-----
46010c PEC Inspection
Land PEC Mark #3
-----
460201 PEC Inspection Test
PEC Inspection was failed.
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460301 PEC Light Teaching
PEC Light Teaching was failed.
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6.7 基板認識
100
SOM-2079
1005-001
異常 ID 異常名、説明、要因および復帰方法
460401 PEC Inspect Command
Error Response of PEC Recog Command
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460501 PEC Inspection
Others
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6.7 基板認識