FX-3R-Rev05 - 第7页
87. SYSTEM DIAGRAM (LNC61/EPV63 LR) .... .......... ..... ..... ....... ..... ..... ....... ..... ..... ....... ..... ..... ....... ..... ..... . ..... ... .... ... ..... .. ... 1 73 ＳＹＳＴ ＥＭ Ｄ ＩＡＧＲ ＡＭ（Ｌ ＮＣ ６ １／ ＥＰＶ ６３ ＬＲ…
64. LIFTER UNIT COMPONENTS FOR ETF (1) ................................................................................................................ 127
ＥＴＦ 用リフターユニット関係（１）
65. LIFTER UNIT COMPONENTS FOR ETF (2) ................................................................................................................ 129
ＥＴＦ 用リフターユニット関係（２）
66. TAPE CUTTER UNIT COMPONENTS FOR ETF_REV.C ............................................................................................ 131
ＥＴＦ 用テープカッターユニット関係＿ ＲＥＶ．Ｃ
67. TAPE CUTTER UNIT COMPONENTS FOR ETF_REV.D (1)....................................................................................... 133
ＥＴＦ 用テープカッターユニット関係＿ ＲＥＶ．Ｄ（１）
68. TAPE CUTTER UNIT COMPONENTS FOR ETF_REV.D (2)....................................................................................... 135
ＥＴＦ 用テープカッターユニット関係＿ ＲＥＶ．Ｄ（２）
69. FIXING BANK COMPONENTS FOR ETF ..................................................................................................................... 137
ＥＴＦ 用固定バンク関係
70. PLACEMENT MONITOR COMPONENTS(1)................................................................................................................ 139
プレースメントモニタ関係（１）
71. PLACEMENT MONITOR COMPONENTS(2)................................................................................................................ 141
プレースメントモニタ関係（２）
72. PLACEMENT MONITOR COMPONENTS(3)................................................................................................................ 143
プレースメントモニタ関係（３）
73. SYSTEM DIAGRAM (POWER UNIT)............................................................................................................................ 145
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＰＯＷＥＲ ＵＮＩＴ）
74. SYSTEM DIAGRAM (SERVO MOTOR) ........................................................................................................................ 147
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＳＥＲＶＯ ＭＯＴＯＲ）
75. SYSTEM DIAGRAM (XY-RELAY) ................................................................................................................................. 149
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＸＹ − ＲＥＬＡＹ）
76. SYSTEM DIAGRAM (Z THETA POWER) ..................................................................................................................... 151
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（Ｚθ ＰＯＷＥＲ）
77. SYSTEM DIAGRAM (Z THETA MOTOR) ..................................................................................................................... 153
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（Ｚθ ＭＯＴＯＲ）
78. SYSTEM DIAGRAM (HEAD LF/LR) .............................................................................................................................. 155
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＨＥＡＤ ＬＦ ／ ＬＲ）
79. SYSTEM DIAGRAM (HEAD RF/RR) ............................................................................................................................. 157
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＨＥＡＤ ＲＦ ／ ＲＲ）
80. SYSTEM DIAGRAM (BASE-CARRY) ........................................................................................................................... 159
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＢＡＳＥ − ＣＡＲＲＹ）
81. SYSTEM DIAGRAM (OPERATION/CPU/MONITOR) ................................................................................................... 161
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＯＰＥＲＡＴＩＯＮ ／ ＣＰＵ ／ ＭＯＮＩＴＯＲ）
82. SYSTEM DIAGRAM (FEEDER STATION).................................................................................................................... 163
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＦＥＥＤＥＲ ＳＴＡＴＩＯＮ）
83. SYSTEM DIAGRAM (MECH TOROLY I/F) ................................................................................................................... 165
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＭＥＣＨ ＴＯＲＯＬＹ Ｉ ／ Ｆ）
84. SYSTEM DIAGRAM (CVS/RFID/TRACEABILITY) ....................................................................................................... 167
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＣＶＳ ／ ＲＦＩＤ ／ ＴＲＡＣＥＡＢＩＬＩＴＹ）
85. SYSTEM DIAGRAM (ELEC TOROLY I/F) .................................................................................................................... 169
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＥＬＥＣ ＴＯＲＯＬＹ Ｉ ／ Ｆ）
86. SYSTEM DIAGRAM (LNC61/EPV63 LF) ...................................................................................................................... 171
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＬＮＣ ６１／ ＥＰＶ ６３ ＬＦ）
87. SYSTEM DIAGRAM (LNC61/EPV63 LR)...................................................................................................................... 173
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＬＮＣ ６１／ ＥＰＶ ６３ ＬＲ）
88. SYSTEM DIAGRAM (LNC61/EPV63 RF)...................................................................................................................... 175
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＬＮＣ ６１／ ＥＰＶ ６３ ＲＦ）
89. SYSTEM DIAGRAM (LNC61/EPV63 RR) ..................................................................................................................... 177
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（ＬＮＣ ６１／ ＥＰＶ ６３ ＲＲ）
90. SYSTEM DIAGRAM (Z-THETA MOTOR LF) ................................................................................................................ 179
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（Ｚθ ＭＯＴＯＲ ＬＦ）
91. SYSTEM DIAGRAM (Z-THETA MOTOR LR)................................................................................................................ 181
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（Ｚθ ＭＯＴＯＲ ＬＲ）
92. SYSTEM DIAGRAM (Z-THETA MOTOR RF) ............................................................................................................... 183
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（Ｚθ ＭＯＴＯＲ ＲＦ）
93. SYSTEM DIAGRAM (Z-THETA MOTOR RR) ............................................................................................................... 185
ＳＹＳＴＥＭ ＤＩＡＧＲＡＭ（Ｚθ ＭＯＴＯＲ ＲＲ）
94. MACHINE REVISION CHART....................................................................................................................................... 187
マシン Ｒｅｖ 表
- 1 -
MAIN UNIT
本体
1. BASE FRAME COMPONENTS(1)
ベースフレーム関係（１）
17 18
12
13
16
14
15
19
11
20
22
21
21
26
27
27
29
24
27
28 27 28
25
2725 27
26
27
26
27
1
23
35
36
35
36
37
7
36
7
37
37
36
37
8
10
9
6
5
3
4
9
10
6
6
8
6
2
30
32
34
33
31