N7202A029B - 第258页
7 爪付きクランパ用空圧回路部:SPG Air Curcuit For Clamper W ith Foil:SPG パーツレイアウト Kit No. キット 品番 Kit Name キット名称 N610140120AA セクションNo. PARTS LAYOUT Section No. - - O19 ( KN610140120AA-03 )
Ref
No.
Remarks R
1
Q'ty
6
マスク吸着用空圧回路部:SPG
Air Curcuit For Mask Vacuum:SPG
ｲﾗｽﾄ
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610140116AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
COVER
1
1 N210143758AA
Valve
1
2 N610026797AB Valve:-F4003
JOINT
1
3 N510066656AA KQ2L12-02AS
SILENCER
1
4 N510064385AA AN15-02
JOINT
1
5 N510066670AA KQ2VT06-02AS
JOINT
1
6 N510066671AA KQ2R04-06A
FILTER
2
7 KXF0DWG8A00 ZFC200-08B
JOINT
4
8 N510066658AA KQ2R06-08A
SWITCH
1
9 N510050112AA ISE30A-C4L-N-MB
BOLT
2
10 N510017513AA
SSS 003 Hexagon socket button head screw M3X6-10.9 A2J (Trivalent)
JOINT
2
11 N510066636AA KQ2UD04-06A
TUBE
1
12 N510058734AA TFU0425W-4-10-X4
TUBE
1
13 KXF0DXNQA00 TU1208W-20
TUBE
1
14 KXF0E113A00 TU0604W-20
TUBE
1
15 KXF07WCAA00 TU0425W-20
BOLT
4
16 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
WASHER
2
17 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
BOLT
2
18 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
WASHER
2
19 N510018479AA
Small round-plain washer 4 10H A2J (Trivalent)
WASHER
4
20 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
4
21 N510018330AA Spring lock washer No.2 4 S A2J (Trivalent)
O18
--
( KN610140116AA-04 )
7
爪付きクランパ用空圧回路部:SPG
Air Curcuit For Clamper With Foil:SPG
パーツレイアウト
Kit No.
キット品番
Kit Name
キット名称
N610140120AA
セクションNo.
PARTS LAYOUT
Section No.
--
O19
( KN610140120AA-03 )
Ref
No.
Remarks R
1
Q'ty
7
爪付きクランパ用空圧回路部:SPG
Air Curcuit For Clamper With Foil:SPG
ｲﾗｽﾄ
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610140120AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
VALVE
1
1 N510064063AA VQZ1121-5MOZ1-C4-F-X543-Q
JOINT
1
2 N510066669AA KQ2L04-08A
JOINT
2
3 N510066465AA KQ2H04-00A
JOINT
2
4 N510066629AA KQ2U04-00A
TUBE
1
5 KXF03PPAA00 TFU0425B-2
TUBE
1
6 KXF03TEAA00 TU0425B-20
BOLT
2
7 N510017341AA
Hexagon socket head cap screw M3X8-10.9 A2J (Trivalent)
WASHER
4
8 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
WASHER
2
9 N510018327AA Spring lock washer No.2 3 S A2J (Trivalent)
BOLT
2
10 N510017316AA
Hexagon socket head cap screw M3X20-10.9 A2J (Trivalent)
O20
--
( KN610140120AA-03 )