N7202A029B - 第272页
14 基板吸着配管共通部:SPG Board Vacuum Piping Common:SPG パーツレイアウト Kit No. キット 品番 Kit Name キット名称 N610140132AA セクションNo. PARTS LAYOUT Section No. - - O33 ( KN610140132AA-03 )
Ref
No.
Remarks R
1
Q'ty
13
真空ポンプ:SPG
Vacuum Pump:SPG
ｲﾗｽﾄ
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610140135AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
WASHER
2
1 N210148533AA
BRACKET
1
2 N210185081AB
BRACKET
1
3 N210143330AC
BRACKET
1
4 N210143793AA
BRACKET
1
5 KXFB0056A00
Valve
1
6 N610026797AB Valve:-F4003
Vacuum Pump
1
7 N610113753AA Vacuum Pump Assy
JOINT
1
8 N510066680AA KQ2LU12-03AS
JOINT
1
9 KXF0E16CA00 KQ2P-12
BOLT
4
10 KXF0DY0ZA00 ME-25
SPACER
2
11 N510055204AA CB-503.5E
JOINT
1
12 N510066656AA KQ2L12-02AS
JOINT
1
13 N510066681AA KQ2H10-02AS
SILENCER
1
14 N510064385AA AN15-02
BOLT
1
15 XVE5B8VW Hexagon socket head cap screw M5X8-A2-70
WASHER
1
16 XWG5VW Round finish plain washer 5 SUS
TUBE
1
17 KXF0DXNQA00 TU1208W-20
TUBE
1
18 KXF0E115A00 TU1065W-20
BOLT
2
19 N510017376AA
Hexagon socket head cap screw M4X6-10.9 A2J (Trivalent)
BOLT
4
20 N510017351AA
Hexagon socket head cap screw M4X16-10.9 A2J (Trivalent)
BOLT
2
21 N510017395AA
Hexagon socket head cap screw M5X16-10.9 A2J (Trivalent)
BOLT
2
22 N510017470AA
Hexagon socket head cap screw M8X16-10.9 A2J (Trivalent)
WASHER
4
23 N510018479AA
Small round-plain washer 4 10H A2J (Trivalent)
WASHER
8
24 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
4
25 N510018499AA
Round finish plain washer 5 10H A2J (Trivalent)
WASHER
2
26 N510018503AA
Round finish plain washer 8 10H A2J (Trivalent)
WASHER
4
27 N510020100AA Thick washer M5
NUT
16
28 N510017862AA
Hexagon nut Type-1 Best class M5-6H-4T A2J (Trivalent)
BOLT
8
29 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
COVER
1
30 N210184853AB
COVER
1
31 N210184854AA
O32
--
( KN610140135AA-06 )
14
基板吸着配管共通部:SPG
Board Vacuum Piping Common:SPG
パーツレイアウト
Kit No.
キット品番
Kit Name
キット名称
N610140132AA
セクションNo.
PARTS LAYOUT
Section No.
--
O33
( KN610140132AA-03 )
Ref
No.
Remarks R
1
Q'ty
14
基板吸着配管共通部:SPG
Board Vacuum Piping Common:SPG
ｲﾗｽﾄ
No.
Part No.
品 名品 番 数量
R
2
パーツリスト
Kit No.
キット品番
Kit Name
キット名称
N610140132AA
Part Name
備 考
セクションNo.
PARTS LIST
Section No.
R
3
PLATE
1
1 N210174467AA
COVER
1
2 N210143758AA
FILTER
3
3 KXF0DWG8A00 ZFC200-08B
MANIFOLD
1
4 KXF07XJAA00 KM13-08-10-3
JOINT
1
5 N510066679AA KQ2R04-10A
SWITCH
1
6 N510050112AA ISE30A-C4L-N-MB
BOLT
2
7 N510017513AA
SSS 003 Hexagon socket button head screw M3X6-10.9 A2J (Trivalent)
JOINT
3
8 N510066675AA KQ2L08-99A
JOINT
3
9 KXF0977AA00 CPS15M-8B
JOINT
3
10 KXF09Y3AA00 CPP15-8B
JOINT
3
11 KXF0DZKRA00 KQ2P-08
TUBE
1
12 KXF0E114A00 TU0805W-20
TUBE
1
13 KXF07WCAA00 TU0425W-20
BOLT
8
14 N510017344AA
Hexagon socket head cap screw M4X10-10.9 A2J (Trivalent)
WASHER
2
15 N510018478AA
Small round-plain washer 3 10H A2J (Trivalent)
WASHER
10
16 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
8
17 N510018330AA Spring lock washer No.2 4 S A2J (Trivalent)
BOLT
2
18 N510017359AA
Hexagon socket head cap screw M4X25-10.9 A2J (Trivalent)
O34
--
( KN610140132AA-03 )