m220_383_02_process_manual工艺手册
Process Manual Tempress ® Systems, Inc. Process manual M220.38 3 .02 Ja nua ry 2004
Process Manual
Tempress
®
Systems, Inc.
Process manual
M220.383.02 January 2004
TABLE OF CONTENTS
P
ROCESS MANUAL
I
Preface ..................................................................................... V
Tempress documentation set.................................................................V
User Definition ......................................................................................VI
Notes, Cautions and Warnings ............................................................VII
Contents description ...........................................................................VIII
Revision History..................................................................................VIII
1. Introduction .......................................................................1-1
1.1 General.....................................................................................1-1
1.2 Process engineer area description............................................ 1-2
2. Safety .................................................................................2-2
2.1 Emergency Off (EMO) .............................................................. 2-2
2.2 Alarm Signals............................................................................ 2-2
2.2.1 Buzzer / LED .............................................................2-2
2.2.2 Touchscreen.............................................................. 2-2
2.2.3 Light tower.................................................................2-3
2.2.4 TSC Alarm menu....................................................... 2-3
2.3 Light tower signal description.................................................... 2-3
2.4 Toxic Material ...........................................................................2-5
2.5 Safety measures....................................................................... 2-5
3. Process setup and acceptance.....................................2.5-1
3.1 Process recipe setup procedure ............................................ 3.1-1
3.1.1 Introduction............................................................. 3.1-1
3.1.2 6 steps to a process recipe..................................... 3.1-1
3.1.3 Recommended command sequence...................... 3.1-2
3.1.4 Modifying the default Tempress recipe...................3.1-3
3.2 Process recipe startup and fine-tuning................................... 3.2-1
3.2.1 Introduction............................................................. 3.2-1
3.2.2 Prerequisites........................................................... 3.2-1
3.2.3 Initial settings.......................................................... 3.2-1