m220_383_02_process_manual工艺手册 - 第41页

PROCESS DESCRIPTION P ROCESS M ANU AL 4.1-6 37 Message EVACUATE 2 [9 ]. Sonalert alarm No 38 Time: 000:05:00 (hr:min:sec ) Variable Command: No 39 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] = OFF,EVACDCS…

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PROCESS DESCRIPTION
P
ROCESS MANUAL
4.1-5
4.1.7 Recipe example: LPCVD siliconnitride from SiH
2
Cl
2
and NH
3
1 00 START RECIPE
2 Message LOAD/UNLOAD [4]. Sonalert alarm No
3 Normal recipe 00 Zone1 800.0 °C Slope 10.00 °C/min Zone2 800.0 °C Slope 10.00
°C/min Zone3 800.0 °C Slope 10.00 °C/min , profile table A
4 Boat to 2000.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min.
Variable Command: No
5 Gas N2 [1] at 0.00 [SLM] Variable Command: No
6 Gas DCS 1 [2] at 0.0 [SCCM] Variable Command: No
7 Gas DCS 2 [3] at 0.0 [SCCM] Variable Command: No
8 Gas NH3 [4] at 0 [SCCM] Variable Command: No
9 Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
10 Digital out ,,,,,,,WATERVLV[8] = ON Variable Command: No
11 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = OFF,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
12 Alarm Limit Setting for All Analog Output Channel at 0 %
13 Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,doorclsd[3] =
OFF,VACFAIL[4] = OFF,WATRCOOL[5] = OFF,,TEMP SCR[7] =
ON,EXCESS[8] = ON
14 Alarm on digital in FANCONTR[9] = ON,,,OPERATE[12] = ON,WARNING[13]
= ON,FAILURE[14] = ON,,
15 01 BOAT OUT
16 Message BOAT OUT [3]. Sonalert alarm No
17 Time: 000:10:00 (hr:min:sec) Variable Command: No
18 Boat to 10.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min. Variable
Command: No
19 Gas N2 [1] at 10.00 [SLM] Variable Command: No
20 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
21 Wait for boat to reach setpoint
22 02 LOAD WAFERS
23 Message LOADWAFERS [5]. Sonalert alarm Yes
24 Wait for operator
25 03 BOAT IN
26 Message BOAT IN [2]. Sonalert alarm No
27 Time: 000:10:00 (hr:min:sec) Variable Command: No
28 Boat to 2000.0 mm at 300.0 mm/min with oscillation speed of 0.0 mm/min.
Variable Command: No
29 Wait for boat to reach setpoint
30 Wait on digital in PRESS N2[1] = OFF,PRESSAIR[2] = OFF,doorclsd[3] =
ON,VACFAIL[4] = OFF,WATRCOOL[5] = OFF,,TEMP SCR[7] =
OFF,EXCESS[8] = OFF
31 04 EVAC 1
32 Message EVACUATE 1 [8]. Sonalert alarm No
33 Time: 000:01:00 (hr:min:sec) Variable Command: No
34 Gas N2 [1] at 0.00 [SLM] Variable Command: No
35 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = OFF Variable Command: No
36 05 EVAC 2
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.1-6
37 Message EVACUATE 2 [9]. Sonalert alarm No
38 Time: 000:05:00 (hr:min:sec) Variable Command: No
39 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
40 Wait on digital in PRESS N2[1] = OFF,PRESSAIR[2] = OFF,doorclsd[3] =
OFF,VACFAIL[4] = ON,WATRCOOL[5] = OFF,,TEMP SCR[7] =
OFF,EXCESS[8] = OFF
41 Branch on wait alarm to step BACKFILL 1. Sonalert alarm Yes
42 06 EVAC 3
43 Message EVACUATE 3 [10]. Sonalert alarm No
44 Time: 000:05:00 (hr:min:sec) Variable Command: No
45 Digital out ,,,,,,,WATERVLV[8] = OFF Variable Command: No
46 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
47 Abort recipe 01
48 07 PURGE
49 Message PURGE [12]. Sonalert alarm No
50 Time: 000:05:00 (hr:min:sec) Variable Command: No
51 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
52 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
53 08 EVACUATE
54 Message EVACUATE 3 [10]. Sonalert alarm No
55 Time: 000:05:00 (hr:min:sec) Variable Command: No
56 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
57 09 LEAKCHECK
58 Message LEAKCHECK [11]. Sonalert alarm No
59 Time: 000:02:00 (hr:min:sec) Variable Command: No
60 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
61 Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 40 MTOR) Variable
Command: No
62 Branch on gas/pressure PRESSURE [8] to step PURGE. Sonalert alarm Yes
63 10 EVACUATE
64 Message EVACUATE 3 [10]. Sonalert alarm No
65 Time: 000:00:30 (hr:min:sec) Variable Command: No
66 Normal recipe 01 Zone1 800.0 °C Slope 0.00 °C/min Zone2 800.0 °C Slope 0.00
°C/min Zone3 800.0 °C Slope 0.00 °C/min , profile table A
67 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
68 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
69 11 SET NH3
70 Message PURGE [12]. Sonalert alarm No
71 Time: 000:01:00 (hr:min:sec) Variable Command: No
72 Gas [NH3 [4]] at [180] [SCCM] Variable Command: Yes
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.1-7
73 12 SET PRESSURE
74 Message PURGE [12]. Sonalert alarm No
75 Time: 000:02:00 (hr:min:sec) Variable Command: No
76 Gas [PRESSURE [8]] at [250] [MTOR] Variable Command: Yes
77 Alarm limit setting for Gas NH3 [4] at 10 % ( ± 50 SCCM) Variable Command: No
78 Branch on gas/pressure NH3 [4] to step NH3 PURGE. Sonalert alarm Yes
79 13 DEPOSITION
80 Message DEPOSITION [13]. Sonalert alarm No
81 Time: [000:30:00] (hr:min:sec) Variable Command: Yes
82 Gas DCS 1 [2] at [60.0] [SCCM] Variable Command: Yes
83 Alarm limit setting for Gas DCS 1 [2] at 10 % ( ± 20.0 SCCM) Variable Command:
No
84 Alarm limit setting for Gas PRESSURE [8] at 5 % ( ± 100 MTOR) Variable
Command: No
85 Branch on gas/pressure DCS 1 [2] to step NH3 PURGE. Sonalert alarm Yes
86 Branch on gas/pressure NH3 [4] to step NH3 PURGE. Sonalert alarm Yes
87 Branch on gas/pressure PRESSURE [8] to step NH3 PURGE. Sonalert alarm Yes
88 14 NH3 PURGE
89 Message PURGE [12]. Sonalert alarm No
90 Time: 000:02:00 (hr:min:sec) Variable Command: No
91 Gas DCS 1 [2] at 0.0 [SCCM] Variable Command: No
92 Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
93 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
94 Alarm Limit Setting for All Analog Output Channel at 0 %
95 15 EVAC CONTINUED
96 Message EVACUATE 3 [10]. Sonalert alarm No
97 Time: 000:05:00 (hr:min:sec) Variable Command: No
98 Gas NH3 [4] at 0 [SCCM] Variable Command: No
99 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
100 16 PURGE
101 Message PURGE [12]. Sonalert alarm No
102 Time: 000:05:00 (hr:min:sec) Variable Command: No
103 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
104 17 EVACUATE
105 Message EVACUATE 3 [10]. Sonalert alarm No
106 Time: 000:05:00 (hr:min:sec) Variable Command: No
107 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
108 18 LEAKCHECK
109 Message LEAKCHECK [11]. Sonalert alarm No
110 Time: 000:02:00 (hr:min:sec) Variable Command: No
111 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
112 Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 40 MTOR) Variable
Command: No