m220_383_02_process_manual工艺手册 - 第42页

PROCESS DESCRIPTION P ROCESS M ANU AL 4.1-7 73 12 SET PRESSURE 74 Message PURGE [12]. Sonalert alarm No 75 Time: 000:02:00 (hr:min:sec ) Variable Command: No 76 Gas [PRESSURE [8]] at [250] [M TOR] Variable Command: Yes 7…

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PROCESS DESCRIPTION
P
ROCESS MANUAL
4.1-6
37 Message EVACUATE 2 [9]. Sonalert alarm No
38 Time: 000:05:00 (hr:min:sec) Variable Command: No
39 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
40 Wait on digital in PRESS N2[1] = OFF,PRESSAIR[2] = OFF,doorclsd[3] =
OFF,VACFAIL[4] = ON,WATRCOOL[5] = OFF,,TEMP SCR[7] =
OFF,EXCESS[8] = OFF
41 Branch on wait alarm to step BACKFILL 1. Sonalert alarm Yes
42 06 EVAC 3
43 Message EVACUATE 3 [10]. Sonalert alarm No
44 Time: 000:05:00 (hr:min:sec) Variable Command: No
45 Digital out ,,,,,,,WATERVLV[8] = OFF Variable Command: No
46 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
47 Abort recipe 01
48 07 PURGE
49 Message PURGE [12]. Sonalert alarm No
50 Time: 000:05:00 (hr:min:sec) Variable Command: No
51 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
52 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
53 08 EVACUATE
54 Message EVACUATE 3 [10]. Sonalert alarm No
55 Time: 000:05:00 (hr:min:sec) Variable Command: No
56 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
57 09 LEAKCHECK
58 Message LEAKCHECK [11]. Sonalert alarm No
59 Time: 000:02:00 (hr:min:sec) Variable Command: No
60 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
61 Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 40 MTOR) Variable
Command: No
62 Branch on gas/pressure PRESSURE [8] to step PURGE. Sonalert alarm Yes
63 10 EVACUATE
64 Message EVACUATE 3 [10]. Sonalert alarm No
65 Time: 000:00:30 (hr:min:sec) Variable Command: No
66 Normal recipe 01 Zone1 800.0 °C Slope 0.00 °C/min Zone2 800.0 °C Slope 0.00
°C/min Zone3 800.0 °C Slope 0.00 °C/min , profile table A
67 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
68 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0 MTOR) Variable Command:
No
69 11 SET NH3
70 Message PURGE [12]. Sonalert alarm No
71 Time: 000:01:00 (hr:min:sec) Variable Command: No
72 Gas [NH3 [4]] at [180] [SCCM] Variable Command: Yes
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.1-7
73 12 SET PRESSURE
74 Message PURGE [12]. Sonalert alarm No
75 Time: 000:02:00 (hr:min:sec) Variable Command: No
76 Gas [PRESSURE [8]] at [250] [MTOR] Variable Command: Yes
77 Alarm limit setting for Gas NH3 [4] at 10 % ( ± 50 SCCM) Variable Command: No
78 Branch on gas/pressure NH3 [4] to step NH3 PURGE. Sonalert alarm Yes
79 13 DEPOSITION
80 Message DEPOSITION [13]. Sonalert alarm No
81 Time: [000:30:00] (hr:min:sec) Variable Command: Yes
82 Gas DCS 1 [2] at [60.0] [SCCM] Variable Command: Yes
83 Alarm limit setting for Gas DCS 1 [2] at 10 % ( ± 20.0 SCCM) Variable Command:
No
84 Alarm limit setting for Gas PRESSURE [8] at 5 % ( ± 100 MTOR) Variable
Command: No
85 Branch on gas/pressure DCS 1 [2] to step NH3 PURGE. Sonalert alarm Yes
86 Branch on gas/pressure NH3 [4] to step NH3 PURGE. Sonalert alarm Yes
87 Branch on gas/pressure PRESSURE [8] to step NH3 PURGE. Sonalert alarm Yes
88 14 NH3 PURGE
89 Message PURGE [12]. Sonalert alarm No
90 Time: 000:02:00 (hr:min:sec) Variable Command: No
91 Gas DCS 1 [2] at 0.0 [SCCM] Variable Command: No
92 Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
93 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
94 Alarm Limit Setting for All Analog Output Channel at 0 %
95 15 EVAC CONTINUED
96 Message EVACUATE 3 [10]. Sonalert alarm No
97 Time: 000:05:00 (hr:min:sec) Variable Command: No
98 Gas NH3 [4] at 0 [SCCM] Variable Command: No
99 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
100 16 PURGE
101 Message PURGE [12]. Sonalert alarm No
102 Time: 000:05:00 (hr:min:sec) Variable Command: No
103 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
104 17 EVACUATE
105 Message EVACUATE 3 [10]. Sonalert alarm No
106 Time: 000:05:00 (hr:min:sec) Variable Command: No
107 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
108 18 LEAKCHECK
109 Message LEAKCHECK [11]. Sonalert alarm No
110 Time: 000:02:00 (hr:min:sec) Variable Command: No
111 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
112 Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 40 MTOR) Variable
Command: No
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.1-8
113 Branch on gas/pressure PRESSURE [8] to step EVAC CONTINUED. Sonalert
alarm Yes
114 19 READY
115 Message STANDBY [1]. Sonalert alarm No
116 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
117 Wait for operator
118 20 BACKFILL 1
119 Message BACKFILL [14]. Sonalert alarm No
120 Time: 000:01:00 (hr:min:sec) Variable Command: No
121 Gas N2 [1] at 0.00 [SLM] Variable Command: No
122 Gas DCS 1 [2] at 0.0 [SCCM] Variable Command: No
123 Gas DCS 2 [3] at 0.0 [SCCM] Variable Command: No
124 Gas NH3 [4] at 0 [SCCM] Variable Command: No
125 Gas PRESSURE [8] at 0 [MTOR] Variable Command: No
126 Digital out ,,,,,,,WATERVLV[8] = ON Variable Command: No
127 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = OFF Variable Command: No
128 Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,doorclsd[3] =
ON,VACFAIL[4] = OFF,WATRCOOL[5] = ON,,TEMP SCR[7] =
ON,EXCESS[8] = ON
129 Abort recipe 08
130 21 BACKFILL 2
131 Message BACKFILL [14]. Sonalert alarm No
132 Time: 000:10:00 (hr:min:sec) Variable Command: No
133 Gas N2 [1] at 10.00 [SLM] Variable Command: No
134 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACDCS1[12] = OFF,EVACDCS2[13] = OFF,EVACNH3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
135 END
4.1.8
Troubleshooting a standard-nitride process
Problem: Cause: Solution:
Wafers are thick at door side and
thin at pump side.
• Depletion of DCS
• Temperature ramp is not
correct.
• Insuffient dummywafers
• Increase temperature ramp
(door side temperature lower
then pump side temperature).
• Decrease process pressure.
• Increase DCS flow.
• Use 5-10 dummy wafers at
pump side
Wafers are thick at the pump side
and thin at the door side.
• Temperature ramp is not
correct.
• Insuffient dummywafers
• Reduce temperature ramp
(door side temperature higher
then pump side temperature).
• Use 12-25 dummy wafers at
doorside
Wafers are thick at the top and
thin at the bottom.
• The paddle is situated too
high in the tube.
• Adjust height of the paddle at
the cantilever system.