m220_383_02_process_manual工艺手册 - 第52页

PROCESS DESCRIPTION P ROCESS M ANU AL 4.2-7 76 Alarm limit setting for Gas SIH4REAR [3] at 10 % ( ± 30.0 ) Variable Comma nd: No 77 Branch on gas/pressure SIH4DOOR [2 ] to step EVACUATE. Sonalert alarm Yes 78 Branch on g…

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PROCESS DESCRIPTION
P
ROCESS MANUAL
4.2-6
37 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
OFF,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
38 Wait on digital in PRESS N2[1] = OFF,PRESSAIR[2] = OFF,doorclsd[3] =
OFF,VACFAIL[4] = ON,,,TEMP SCR[7] = OFF,EXCESS[8] = OFF
39 Branch on wait alarm to step BACKFILL 1. Sonalert alarm Yes
40 06 EVAC 3
41 Message EVACUATE 3 [10]. Sonalert alarm No
42 Time: 000:05:00 (hr:min:sec) Variable Command: No
43 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
44 Abort recipe 01
45 07 PURGE
46 Message PURGE [12]. Sonalert alarm No
47 Time: 000:05:00 (hr:min:sec) Variable Command: No
48 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
49 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0.0 ) Variable Command: No
50 08 EVACUATE
51 Message EVACUATE 3 [10]. Sonalert alarm No
52 Time: 000:05:00 (hr:min:sec) Variable Command: No
53 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
54 09 LEAKCHECK
55 Message LEAKCHECK [11]. Sonalert alarm No
56 Time: 000:02:00 (hr:min:sec) Variable Command: No
57 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
58 Alarm limit setting for Gas PRESSURE [8] at 2 % ( ± 0.0 ) Variable Command: No
59 Branch on gas/pressure PRESSURE [8] to step PURGE. Sonalert alarm Yes
60 10 EVACUATE
61 Message EVACUATE 3 [10]. Sonalert alarm No
62 Time: 000:00:30 (hr:min:sec) Variable Command: No
63 Normal recipe 01 Zone1 610.0 °C Slope 0.00 °C/min Zone2 610.0 °C Slope 0.00
°C/min Zone3 610.0 °C Slope 0.00 °C/min , profile table A
64 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
65 Alarm limit setting for Gas PRESSURE [8] at 0 % ( ± 0.0 ) Variable Command: No
66 11 SET GASFLOWS
67 Message PURGE [12]. Sonalert alarm No
68 Time: 000:01:00 (hr:min:sec) Variable Command: No
69 Gas [SIH4DOOR [2]] at [60.0] [sccm] Variable Command: Yes
70 Gas [SIH4REAR [3]] at [60.0] [sccm] Variable Command: Yes
71 12 SET PRESSURE
72 Message PURGE [12]. Sonalert alarm No
73 Time: 000:02:00 (hr:min:sec) Variable Command: No
74 Gas [PRESSURE [8]] at [250.0] [mtor] Variable Command: Yes
75 Alarm limit setting for Gas SIH4DOOR [2] at 10 % ( ± 30.0 ) Variable Command:
No
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.2-7
76 Alarm limit setting for Gas SIH4REAR [3] at 10 % ( ± 30.0 ) Variable Command:
No
77 Branch on gas/pressure SIH4DOOR [2] to step EVACUATE. Sonalert alarm Yes
78 Branch on gas/pressure SIH4REAR [3] to step EVACUATE. Sonalert alarm Yes
79 13 DEPOSITION
80 Message DEPOSITION [13]. Sonalert alarm No
81 Time: [000:30:00] (hr:min:sec) Variable Command: Yes
82 Alarm limit setting for Gas PRESSURE [8] at 5 % ( ± 0.0 ) Variable Command: No
83 Branch on gas/pressure SIH4DOOR [2] to step EVACUATE. Sonalert alarm Yes
84 Branch on gas/pressure SIH4REAR [3] to step EVACUATE. Sonalert alarm Yes
85 Branch on gas/pressure PRESSURE [8] to step EVACUATE. Sonalert alarm Yes
86 14 EVACUATE
87 Message EVACUATE 3 [10]. Sonalert alarm No
88 Time: 000:05:00 (hr:min:sec) Variable Command: No
89 Gas N2 [1] at 0.0 [slm] Variable Command: No
90 Gas SIH4DOOR [2] at 0.0 [sccm] Variable Command: No
91 Gas PRESSURE [8] at 0.0 [mtor] Variable Command: No
92 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
93 Alarm limit setting for Gas SIH4DOOR [2] at 0 % ( ± 0.0 ) Variable Command: No
94 Alarm limit setting for Gas SIH4REAR [3] at 0 % ( ± 0.0 ) Variable Command: No
95 Alarm limit setting for Gas PRESSURE [8] at 1 % ( ± 0.0 ) Variable Command: No
96 Wait for gas PRESSURE [8]
97 15 PURGE
98 Message PURGE [12]. Sonalert alarm No
99 Time: 000:05:00 (hr:min:sec) Variable Command: No
100 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
101 16 EVACUATE
102 Message EVACUATE 3 [10]. Sonalert alarm No
103 Time: 000:05:00 (hr:min:sec) Variable Command: No
104 Digital out N2 PURGE[9] = OFF,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = ON Variable Command: No
105 17 READY
106 Message STANDBY [1]. Sonalert alarm No
107 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = ON Variable Command: No
108 Wait for operator
109 18 BACKFILL 1
110 Message BACKFILL [14]. Sonalert alarm No
111 Time: 000:01:00 (hr:min:sec) Variable Command: No
112 Gas N2 [1] at 0.0 [slm] Variable Command: No
113 Gas SIH4DOOR [2] at 0.0 [sccm] Variable Command: No
114 Gas PRESSURE [8] at 0.0 [mtor] Variable Command: No
115 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = ON,MAINVAC[16] = OFF Variable Command: No
116 Alarm on digital in PRESS N2[1] = ON,PRESSAIR[2] = ON,doorclsd[3] =
ON,VACFAIL[4] = OFF,,,TEMP SCR[7] = ON,EXCESS[8] = ON
117 Abort recipe 08
PROCESS DESCRIPTION
P
ROCESS MANUAL
4.2-8
118 19 BACKFILL 2
119 Message BACKFILL [14]. Sonalert alarm No
120 Time: 000:10:00 (hr:min:sec) Variable Command: No
121 Gas N2 [1] at 100.0 [slm] Variable Command: No
122 Digital out N2 PURGE[9] = ON,N2PROCES[10] = ON,PROCESS[11] =
ON,EVACSIL1[12] = OFF,EVACSIL2[13] = OFF,EVACSIL3[14] =
OFF,SOFTSTRT[15] = OFF,MAINVAC[16] = OFF Variable Command: No
123 END
4.2.8
Troubleshooting a flat poly process
Problem: Cause: Solution:
Wafers are thick at door side and
thin at pump side.
• Gas distribution is incorrect • Increase gasload from the
pump side
Wafers are thick at the pump side
and thin at the door side.
• Gas distribution is incorrect • Increase gasload from the
doorside
Wafers are thick at the top and
thin at the bottom.
• The paddle is situated too
high in the tube.
• The paddle is colder then the
wafers and the tube.
• Adjust height of the paddle at
the cantilever system.
• Insert temperature
stabilization step in the recipe
after ‘evacuate’ and/or ‘heat
up’ step.
Wafers are thick at the edges and
thin at the center.
• Temperature is not
homogeneous within wafer.
• Pressure is too high.
• Insert temperature
stabilization step in the recipe
after ‘boat in’ and/or ‘heat up’
step.
• Decrease pressure.
No consistency in uniformity.
• Dirty quartz ware or wafers.
• No constant pressure control.
• Draft along the furnace.
• Clean tube, quartz ware and
paddle.
• Use clean wafers.
• Check pressure control.
• Decrease draft by reducing
overpressure cleanroom or
close possible draft holes.
Layer is too thin cross load.
• Deposition time is too short.
• Pressure is too low.
• Increase deposition time in
recipe.
• Increase pressure.
Layer is too thick cross load
• Deposition time is too long.
• Pressure is too high.
• Decrease deposition time in
recipe.
• Decrease pressure.