m220_383_02_process_manual工艺手册 - 第63页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 5.2 Login TSC-2 Changing login name ma y be required to couple process data to opera tor and process proceeding for logging data. 5.2.1 TSC-2 1) Press “ID” to Login as screen unti…

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.Operation Instructions

This document describes the various procedures required for a process engineer. The

procedures describe all information according to the process engineers.

5.1 Load or Unload process wafers

Loading and unloading process wafers on the paddle is required before and after each process

run.

5.1.1

Load process wafers

• Place the wafers on the wafer carriers, depending on the situation with (vacuum)

tweezers or a wafer transfer system.

• Pick-up wafer carriers with a pick-up fork or automated loading tool.

• Place the wafer carriers around the center of flatzone as indicated on the

loadstation.

5.1.2 Unload wafers

CAUTION

Wafers and paddle are hot.

• Allow the wafers to cool down.

• Pick-up wafer carriers with a pick-up fork or automated loading tool. (Amtech

Systems S300)

• Remove the wafers from the wafer carriers, depending on the situation with

(vacuum) tweezers or a wafer transfer system.

5.1-1

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.2 Login TSC-2

Changing login name may be required to couple process data to operator and process

proceeding for logging data.

5.2.1 TSC-2

1) Press “ID” to Login as

screen until following screen

appears:

USER

2) Type the personal username

and password

3) Press “Login” to login or

“Logout” to logout

5.2-1

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.3 Selecting a new process recipe

A new process recipe needs to be selected so the new instructions can be executed. A new

process recipe can only be selected if the current process recipe is in ‘Step 0‘.

5.3.1

Touchscreen

1) return to the Main Menu by

pressing ‘ESC’ until the

following screen appears:

2) press ‘4’ to access ‘Tube

control’

5.3-1

3) press ‘6’ to ‘Select a Process

Recipes’

4) select the desired process

recipe by entering its

number.