m220_383_02_process_manual工艺手册 - 第65页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 5) press ‘Yes’ to confir m the question ‘Sure to SELECT PROCESS recipe (Yes/No)?’ Note: selecting another process recipe is only possible if the current proc ess recipe is in Step…

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.3 Selecting a new process recipe

A new process recipe needs to be selected so the new instructions can be executed. A new

process recipe can only be selected if the current process recipe is in ‘Step 0‘.

5.3.1

Touchscreen

1) return to the Main Menu by

pressing ‘ESC’ until the

following screen appears:

2) press ‘4’ to access ‘Tube

control’

5.3-1

3) press ‘6’ to ‘Select a Process

Recipes’

4) select the desired process

recipe by entering its

number.

OPERATION INSTRUCTIONS

ROCESS MANUAL

5) press ‘Yes’ to confirm the

question ‘Sure to SELECT

PROCESS recipe (Yes/No)?’

Note: selecting another process recipe is only possible if the current process recipe is in

Step 0.

5.3-2

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.3.2 TSC-2

1) select the desired tube from the

pull-down menu or from the

‘Overview’ screen.

2) select ‘Operations’ to access the

operations screen.

3) Select the desired process recipe

from the pull-down menu

4) Press ‘Yes’ to confirm the

question ‘Are you sure to select

another process recipe?’

Note: selecting another process

recipe is only possible if the

current process recipe is in Step 0.

5.3-3