m220_383_02_process_manual工艺手册 - 第67页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 5.4 Start/Continue a new process recipe Two different situations req uire the ‘Start‘ comm and. The first situation is starting a newly selected pr ocess recip e so it starts runn…

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.3.2 TSC-2

1) select the desired tube from the

pull-down menu or from the

‘Overview’ screen.

2) select ‘Operations’ to access the

operations screen.

3) Select the desired process recipe

from the pull-down menu

4) Press ‘Yes’ to confirm the

question ‘Are you sure to select

another process recipe?’

Note: selecting another process

recipe is only possible if the

current process recipe is in Step 0.

5.3-3

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.4 Start/Continue a new process recipe

Two different situations require the ‘Start‘ command.

The first situation is starting a newly selected process recipe so it starts running from Step 0.

The second situation is starting a process recipe that has been stopped or is waiting for an

‘Operator‘ instruction.

5.4.1

Touchscreen

1) return to the Main Menu by

pressing ‘ESC’ until the

following screen appears:

2) press ‘4’ to access ‘Tube Control’

3) press ‘2’ to access ‘Start/Stop

Process Recipe’.

4) press ‘Start’ to start/continue the

selected process recipe.

5.4-1

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.4.2

TSC-2

1) select the desired tube from the

pull-down menu or from the

‘Overview’ screen.

select ‘Operations’ to access

the operations screen.

3) press ‘Start’ to start the selected

process recipe from ‘Step 0’

4) press ‘Continue’ to start a

process recipe that has been

stopped or is waiting for an

‘Operator‘ instruction.

5) press ‘Yes’ to confirm the

question ‘Do you want to start?’

5.4-2