m220_383_02_process_manual工艺手册 - 第7页
PREFACE P ROCESS M ANU AL V Preface This set of manuals explains how to operate and m aintain a Horizontal Diffusion/LPCV D furnace. Refer to the Touchscreen re ference manual (M440.00) or the TSC-2 reference manual (M45…
TABLE OF CONTENTS
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5.8 Clear Alarms.......................................................................... 5.8-2
5.8.1 Required action....................................................... 5.8-2
5.8.2 Touchscreen........................................................... 5.8-2
5.8.3 TSC-2..................................................................... 5.8-3
5.9 Write/Edit process recipe....................................................... 5.9-2
5.9.1 Touchscreen........................................................... 5.9-2
5.9.2 TSC-2..................................................................... 5.9-3
5.10 Edit graphical image............................................. 5.10-2
5.10.1 Touchscreen......................................................... 5.10-2
5.10.2 TSC-2................................................................... 5.10-2
5.11 Logging process data ........................................... 5.11-2
5.11.1 TSC-2 (only) ......................................................... 5.11-2
PREFACE
P
ROCESS MANUAL
V
Preface
This set of manuals explains how to operate and maintain a Horizontal Diffusion/LPCVD
furnace.
Refer to the Touchscreen reference manual (M440.00) or the TSC-2 reference manual
(M450.00) for a full description of all operating screens.
For information about maintenance, refer to the maintenance manual (M230.00).
The Tempress Horizontal Diffusion Furnaces are fully described in the reference manuals
(M300.00).
Tempress documentation set
The complete Tempress documentation set includes:
• Safety manual
• Operator manual
• Reference manuals
1. Loadstation
2. Furnace
3. Gas cabinet
4. Main Power cabinet
5. DPC (Digital Process Controller)
6. DTC (Digital Temperature Controller)
7. ETC (Excess Temperature Controller)
8. Touchscreen
9. TSC-2 (+ SECS/GEM)
• Vendor documentation
1. Digital pressure switch
2. Mass Flow Controllers
3. External torch controller (if used)
PREFACE
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ROCESS MANUAL
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User Definition
It is strongly recommended that all users first read this manual before starting any procedure.
To produce an accessible manual suiting on various responsibilities, Tempress defines the
following users:
Operator
The operator is handling the process from loading until unloading of the wafers. Therefore
the operator needs to select a recipe, put the wafers on the boat, fill in Lot ID, Start the
process and monitor the progress using the Touchscreen and/or TSC-II.
Process engineer
The process engineer is a qualified chemical engineer, who is responsible for the process
recipes and their results. The process engineer writes, tests and releases new process recipes.
Service or Maintenance engineer
The maintenance engineer is a qualified electrician or mechanic, who is responsible for a
proper functioning system in accordance to its designated purpose. A Tempress qualified
service engineer will perform the first installation.