m220_383_02_process_manual工艺手册 - 第74页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 5.7-2 commands stored’ appears. 7) Go to the Start/Continue a new process recipe procedure to start the process re cipe if it is not running.

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.7 Edit ‘Variable Process Command’

‘Variable Process Command‘ can be used to quickly modify specific process settings. Only

those lines in the process recipe that have been assigned as ‘Variable Commands‘ will be

presented in a list. From this list the desired process setting may be modified.

‘Variable Process Command‘ can be set at all times until the recipe step is executed in which

the specific ‘Variable Command‘ is programmed.

5.7.1

Touchscreen

1) return to the Main Menu by

pressing ‘ESC’ until the following

screen appears:

2) press ‘4’ to access ‘Tube Control’

3) press ‘5’ to access ‘Variable

Commands’

4) edit the desired process setting

1) enter the

corresponding line

number

2) modify to the

desired setting

3) press ‘Return’ to

confirm the

modification

repeat step 4) until all desired

process settings have been

set

6) Press ‘Esc’ to store the new

commands. The message

‘Process recipe variable

5.7-1

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.7-2

commands stored’ appears.

7) Go to the Start/Continue a

new process recipe procedure

to start the process recipe if it is

not running.

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.7.2

TSC-2

1) select the desired tube from the

pull-down menu or from the

‘Overview’ screen.

2) select ‘Operations’ to access the

operations screen.

3) Select ‘Edit Variable Commands’

to open the list with available

Variable Commands

4) edit the desired process setting

1) highlight the desired process

setting

2) press ‘Edit’ to open the Edit

mode

3) modify to the desired process

setting

5) press ‘Updates’ to store the new

commands

6) go to the Start/Continue a new

process recipe procedure to

start the process recipe if it is not

running.

5.7-3