m220_383_02_process_manual工艺手册 - 第78页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 5.9 Write/Edit process recipe A new process recipe needs to be written or edit ed so the desired instructions are e xecuted in the required order. A new process recipe can always …

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.8.3

TSC-2

1) the overview screen gives an

instant view of which tubes are in

alarm in RED

2) select the desired tube from the

pull-down menu or from the

‘Overview’ screen

select the ‘Alarm’ screen

3) read the alarm message(s)

4) take the appropriate action as

described in section Error!

Reference source not found.

5.8-3

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.9 Write/Edit process recipe

A new process recipe needs to be written or edited so the desired instructions are executed in

the required order. A new process recipe can always be generated. Editing an existing and

RUNNING recipe is possible but poses considerable danger. It is therefore NOT allowed,

except when using variable commands only.

5.9.1

Touchscreen

1) return to the Main Menu by

pressing ‘ESC’ until the

following screen appears:

2) press ‘3’ to access ‘Process

Recipes’

3) enter recipe nr. to edit or ‘0’ to

create a new process recipe

followed by ‘RETURN’

4) follow instruction at the bottom

line to add or edit commands.

5.9-2

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.9.2 TSC-2

1) return to the main overview

screen

2) select ‘Recipes’ in the

navigation bar to access the

recipe screen

3) double click ‘Normal’ or

‘Abort’ in the mainfield

4) select ‘New’ to create a new

or ‘Edit’ to edit a process

recipe

5) for a new process recipe

confirm the question: ‘Do

you want to add a new recipe’

6) give recipe name

5.9-3