m220_383_02_process_manual工艺手册 - 第80页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 7) select a recipe to copy from or cancel 8) repeat step 3-7 for each process step and command. 5.9-4

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.9.2 TSC-2

1) return to the main overview

screen

2) select ‘Recipes’ in the

navigation bar to access the

recipe screen

3) double click ‘Normal’ or

‘Abort’ in the mainfield

4) select ‘New’ to create a new

or ‘Edit’ to edit a process

recipe

5) for a new process recipe

confirm the question: ‘Do

you want to add a new recipe’

6) give recipe name

5.9-3

OPERATION INSTRUCTIONS

ROCESS MANUAL

7) select a recipe to copy from

or cancel

8) repeat step 3-7 for each

process step and command.

5.9-4

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.10 Edit graphical image

To support the process recipe and to give actual progress information during the process run

a graphical representation of the tube and its components can be added to the process

certifications.

The touchscreen allows predefined symbols and locations only, TSC-2 allows total freedom

for the graphical operations screen layout.

Note: For accurate representation keep the process gas schematic at hand.

5.10.1

Touchscreen

1) return to the Main Menu by

pressing ‘ESC’ until the

following screen appears:

2) press ‘2’ to access ‘Tube

Certifications’

3) press ‘1’ to access ‘Process

Controller Certifications’

5.10-2

4) press ‘8’ to access ‘Graphic

System Layout’