m220_383_02_process_manual工艺手册 - 第88页
OPERATION INSTRUCTIONS P ROCESS M ANU AL 5.11 Logging process data Logging data is automaticall y collected and can be used to optimiz e the process based on the process results. This logging function is o nly available …
OPERATION INSTRUCTIONS
P
ROCESS MANUAL
15) Select Digital condition for
ON/OFF change of a property,
such as the valve fill color
connected to a DO status
16) Select Data above value for AO
minimum value change of a
property, such as the MFC fill
color connected to an AO status.
Recommended value is 0.05
17) Select Absolute for real value
change of a text object, such as
gas flow (AO) or temperature
(spike or paddle)
18) Select Relative with Multiply for
a relative change, such as the
loader object position on the
screen connected to the real
value boatloader position.
Note: Recommend value is 0.10, it
must be verified with actual
boatloader travel distance and screen
position
Note: make sure to press SAVE to
store any modification.
5.10-5
OPERATION INSTRUCTIONS
P
ROCESS MANUAL
5.11 Logging process data
Logging data is automatically collected and can be used to optimize the process based on the
process results.
This logging function is only available in TSC-2, not on a touchscreen.
5.11.1
TSC-2 (only)
1) Return to the main overview
screen
2) Select ‘Data’ in the navigation
bar to access the data logging
screen
3) Select Log Data
4) Double click on a predefined
dataset or use the New button
to create one
5) Select the data points of interest
5.11-2
OPERATION INSTRUCTIONS
P
ROCESS MANUAL
6) Select History Time to select
logging data based on a Start and
End time.
Note: if the desired Start Time is
later than the time already shown,
the END Time must be extended
first.
7) Select History Lot to search all
logging data for matching Lot
IDs.
Note: use wildcards to extend the
search
8) Select History Recipe to search
all logging data for matching
recipe names
Note: use wildcards to extend the
search
5.11-3