m220_383_02_process_manual工艺手册 - 第89页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 6) Select Histor y Time to selec t logging data based on a S tart and End time. Note: if the desired Start Time is later than th e time already sho wn, the END Time mus t be exten…

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.11 Logging process data

Logging data is automatically collected and can be used to optimize the process based on the

process results.

This logging function is only available in TSC-2, not on a touchscreen.

5.11.1

TSC-2 (only)

1) Return to the main overview

screen

2) Select ‘Data’ in the navigation

bar to access the data logging

screen

3) Select Log Data

4) Double click on a predefined

dataset or use the New button

to create one

5) Select the data points of interest

5.11-2

OPERATION INSTRUCTIONS

ROCESS MANUAL

6) Select History Time to select

logging data based on a Start and

End time.

Note: if the desired Start Time is

later than the time already shown,

the END Time must be extended

first.

7) Select History Lot to search all

logging data for matching Lot

IDs.

Note: use wildcards to extend the

8) Select History Recipe to search

all logging data for matching

recipe names

Note: use wildcards to extend the

5.11-3

OPERATION INSTRUCTIONS

ROCESS MANUAL

9) Select History Actual for real

time logging

10) Select the Graphical tab page for

a graphical presentation of the

logging data found by the search

criteria above

11) Select the Data tab page for the

raw data presentation of the

logging data found by the search

criteria above

5.11-4