m220_383_02_process_manual工艺手册 - 第9页
PREFACE P ROCESS M ANU AL Notes, Cautions and Warnings Notes, Cautions and Warnings appe ar throughout this manual, where extra attention is required to a particular (safety ) item . Three levels can be distinguished: ) …
PREFACE
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ROCESS MANUAL
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User Definition
It is strongly recommended that all users first read this manual before starting any procedure.
To produce an accessible manual suiting on various responsibilities, Tempress defines the
following users:
Operator
The operator is handling the process from loading until unloading of the wafers. Therefore
the operator needs to select a recipe, put the wafers on the boat, fill in Lot ID, Start the
process and monitor the progress using the Touchscreen and/or TSC-II.
Process engineer
The process engineer is a qualified chemical engineer, who is responsible for the process
recipes and their results. The process engineer writes, tests and releases new process recipes.
Service or Maintenance engineer
The maintenance engineer is a qualified electrician or mechanic, who is responsible for a
proper functioning system in accordance to its designated purpose. A Tempress qualified
service engineer will perform the first installation.
PREFACE
P
ROCESS MANUAL
Notes, Cautions and Warnings
Notes, Cautions and Warnings appear throughout this manual, where extra attention is
required to a particular (safety) item. Three levels can be distinguished:
)
NOTE
Notes alert to pay attention to items or procedures of special importance.
CAUTION
Cautions alert for a potentially hazardous situation that may result in minor
or moderate injuries.
Cautions can also alert for potential equipment and/or product damage.
WARNING
Warnings alert for conditions that may result in permanent and/or lethal
injuries.
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PREFACE
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ROCESS MANUAL
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Contents description
This manual is divided into the following sections and appendices:
Section 1 Introduction
Provides an overview of the Tempress Systems Inc.
Horizontal furnace, what it is and what it can do.
Section 2 Safety
Describes the safety components and functions. It describes all measures
that are required to provide a safe way of working.
Section 3 Process setup and acceptance
Describes the basis of how to setup a process recipe and how to handle
alarms that are generated during the process. Finally all minimal process
requirements for acceptable process results are defined in process
acceptance.
Section 4 Process description
Contains specific process information including chemicals used, start-up
parameters and a basic recipe layout.
Section 5 Operation Instruction
Describes all procedures that are required for the process engineer.
Revision History
This manual is revision 0 of the Process Manual and is intended to explain the required
procedures. The function and screens it describes are based on the following software
releases:
• TSC 2 version 6.0 (17-02-2003)
• DPC 2.I.03 (17-02-2003)
• DTC 2.F.02 (17-02-2003)
• Touchscreen 2.I.05 (17-02-2003)
For minor software and hardware changes, addendum to this manual will be available. For
major changes, a new revision will be available. For price information or other questions
please contact Tempress Systems Inc.