m220_383_02_process_manual工艺手册 - 第90页

OPERATION INSTRUCTIONS P ROCESS M ANU AL 9) Select Histo ry Actual for real time logging 10) Select the Gra phical tab page fo r a graphical presen tation of the logging data found by the searc h criteria above 11) Selec…

OPERATION INSTRUCTIONS

ROCESS MANUAL

6) Select History Time to select

logging data based on a Start and

End time.

Note: if the desired Start Time is

later than the time already shown,

the END Time must be extended

first.

7) Select History Lot to search all

logging data for matching Lot

IDs.

Note: use wildcards to extend the

8) Select History Recipe to search

all logging data for matching

recipe names

Note: use wildcards to extend the

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OPERATION INSTRUCTIONS

ROCESS MANUAL

9) Select History Actual for real

time logging

10) Select the Graphical tab page for

a graphical presentation of the

logging data found by the search

criteria above

11) Select the Data tab page for the

raw data presentation of the

logging data found by the search

criteria above

5.11-4

OPERATION INSTRUCTIONS

ROCESS MANUAL

5.11-5

12) Select the Alarm tab page for all

alarm messages of the logging

data found by the search criteria

above

13) Use the Right Mouse Button

(RMB) in the Graphical tab page

to gain access to the

customization dialog. Titles and

fonts can be added and/or

modified here