SP60P-L Mechanical - 第106页
11-D マスククリーニング ユニット (L) M ask Cl eanin g Un it(L ) パーツレイアウト Kit N o . キット品 番 Kit N am e キット名称 KXF X03BUA00 ｾｸｼｮﾝNo. PARTS LAYOUT Section No. - - M81 ( KKXFX03BUA00-06-4 )
Ref
No.
Remarks
R
1
Q'ty
11-C
マスククリーニングユニット(L)
Mask Cleaning Unit(L)
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
KXFX03BUA00
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
DUCT
1
1 KXFB08YNA01
PLATE
1
2 KXFB034DC01
PLATE
1
3 N210051270AA
PLATE
1
4 KXFB08YQA02
NOZZLE
1
5 KXFB08YTA01
NOZZLE
1
6 KXFB08YVA00
PLATE
1
7 KXFB035FB00
COLLAR
2
8 KXFB08Z0A01
COVER
1
9 KXFB08Z4A02
BRACKET
1
10 N210044752AB
OIL-SEAL
1
11 KXF0E19NA00 BM 1215 A3
CYLINDER
1
12 KXF0DXCKA00 SSD-L-32-30-T0V-D
SPEED-CONTROLLER
2
13 KXF0DZHSA00 AS2301F-01-04S
PLUNGER
1
14 KXF0E0UDA00 PFSSN5
LINEAR-WAY
2
15 N510019504AA LWLF24C1R80BCSS1E724
PLUG
1
16 KXF0AP5AA00 SP2001
WASHER
1
17 KXF0DYYLA00 FWSSB-D20.0-V8.0-T7.0
SCREW
2
18 N510018419AA
Hexagon socket set screw Flat point M3X3-45H A2J (Trivalent)
SCREW
2
19 N510018257AA
Cross recessed Truss head machine screw M4X10-4.8 A2J (Trivalent)
BOLT
2
20 N510017452AA
Hexagon socket head cap screw M6X65-10.9 A2J (Trivalent)
WASHER
2
21 KXF0B6AAA00 WSSB14-6-3
WASHER
1
22 KXF0CPJAA00 WSSB20-8-3
WASHER
1
23 KXF0AJKAA00 WSSB13-8-3
PIN
2
24 KXF01UYAA00 MS3-8
BOLT
6
25 KXF08P0AA00 Hexagon socket head cap screw M3X25L(SUS)
BOLT
4
26 KXF08RNAA00 Hexagon socket head cap screw M4X16L(SUS)
JOINT
5
27 KXF07RJAA00 L4N6X4-PT1/8
NOZZLE
1
28 KXFB0ATQA00
M80
--
( KKXFX03BUA00-06-3 )
11-D
マスククリーニングユニット(L)
Mask Cleaning Unit(L)
パーツレイアウト
Kit N
o
.
キット品
番
Kit Name
キット名称
KXFX03BUA00
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
--
M81
( KKXFX03BUA00-06-4 )
Ref
No.
Remarks
R
1
Q'ty
11-D
マスククリーニングユニット(L)
Mask Cleaning Unit(L)
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
KXFX03BUA00
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
PLATE
1
1 N210001568AA
BOX
1
2 N210044744AA
BRACKET
1
3 N210008170AA
PLATE
1
4 N210001692AA
BRACKET
1
5 KXFB08YWA00
PLATE
1
6 KXFB034XA01
PLATE
1
7 N210001694AA
BRACKET
1
8 KXFB08YXA01
BRACKET
1
9 KXFB035JC00
PLATE
1
10 KXFB035LB00
BLOCK
1
11 KXFB035ND00
PLATE
1
12 KXFB035PA01
PIN
1
14 N210001697AA
D-PIN
1
15 N210001698AA
BLOCK
1
16 N210001569AA
BRACKET
1
17 KXFB035VC02
DOG
1
18 KXFB035XA01
BRACKET
1
19 N210001699AA
BRACKET
1
20 KXFB08Z6A00
VALVE
1
21 N510015625AA CV101-05FM003-X
JOINT
1
22 KXF07J0AA00 C4N6X4-PT1/8
JOINT
2
23 KXF02BZAA00 KQL06-02S
VALVE
1
24 KXF0DWTSA00 FAB31-8-6-12CS-3
SILENCER
1
25 KXF00WEAA00 AN203-02
HINGE
2
26 N510023812AA B-63-1
CYLINDER
1
27 KXF095CAA00 CJ2B16-15
SPEED-CONTROLLER
2
28 KXF00YMAA00 AS1201F-M5-04
SENSOR
1
29 KXF09WWAA00
A
PM2-LL10-C1
BEARING
1
30 KXF09T3AA00 UMBB8-30
WASHER
1
31 KXF05MMAA00 SSWA13-3.0
PIN
1
32 KXF07C0AA00 MSTH6-20
PULL
1
33 KXF00RYAA00 A-231-2
CABLE-BEAR
1
34 KXF0DX30A00 340.050-075-15-3050.12PZ
SPACER
2
35 N510017093AA CB-315E
FLOATING-JOINT
1
36 KXF0277AA00 JA15-5-080
PIN
2
37 KXF02Y6AA00 MS4-10
BOLT
4
38 N510017663AA
Hexagon socket Flat head bolt M8X25-10.9 A2J (Trivalent)
BOLT
1
39 N510017781AA
Hexagon head bolt Best class M8X40-6g 4T A2J (Trivalent) Full thread
BOLT
2
40 KXF0DV6AA00 CBS5-16
WASHER
2
41 KXF0DWXDA00 WSSB12-5-1
JOINT
1
43 N510020197AA VSL-01
BAND
2
44 KXF0DWU5A00 SY32
TRIM
1
45 KXF0DULAA00 CE-024
DOG
1
46 KXFB035YA01
BRACKET
1
47 N210001701AA
M82
--
( KKXFX03BUA00-06-4 )