00195963-03_MM SWS-EN - 第3页
3 Table o f Contents Cont ainment of Servi ce Box SWS (00 519790 - 01) ....................................................... 10 Tools and E quipment .....................................................................…
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ASM Assembly Systems GmbH& Co. KG
Rupert-Mayer-Strasse 44
81379 München
Germany
www.asm-smt.com
Item no.: 00195963-03
Printed by ASM Assembly Systems
3
Table of Contents
Containment of Service Box SWS (00519790-01) ....................................................... 10
Tools and Equipment .................................................................................................... 11
Consumables and Wearparts ....................................................................................... 11
Important Points to Note when Carrying out Maintenance Work .............................. 12
Before Carrying out Maintenance Work .................................................................................................... 12
After Completing the Maintenance Work .................................................................................................. 13
Opening and Closing the Interior of the SWS .......................................................................................... 13
Using the Multipette .................................................................................................................................... 15
Overview of the Modules of the SWS .......................................................................... 20
Maintenance Schedule.................................................................................................. 22
Maintenance Schedule According to Intervals ........................................................................................ 22
4
General Maintenance Work .......................................................................................... 25
Emptying Reject Bin and Vacuuming the Nozzle Changer ..................................................................... 25
Checking the Exhaust Air Pressure Manometer for Die Attach and Flip Unit ....................................... 26
Visual Check and Cleaning of the Machine Interior ................................................................................. 27
Checking the Energy Chain for Ease-of-Movement and the Correct Position of the Latches ............... 27
Maintenance Work at the Die Ejector ........................................................................... 28
Moving the Wafer Table into Wafer Change Position ............................................................................... 28
Cleaning the Vacuum Cap and Checking the Ejection Needle ............................................................... 31
Cleaning the Magnets and Ceramic Spheres of the Needle System ...................................................... 33
Cleaning the Prism and the Magnetic Contact Surfaces at the Centering Unit ....................................... 33
Checking the Suppression Pins of the Needle System ........................................................................... 34
Checking the Sealing Ring at the Needle System and the Centering Unit for Leaks ............................. 35
Lubricating the Shaft for the Z Movement at the Needle System ........................................................... 40
Checking the Rotary Locking for Ease-of-Movement.............................................................................. 41
Checking the Die Ejector for Vacuum leaks ............................................................................................. 42
Cleaning the Linear Guide of the Die Ejector ........................................................................................... 46
Maintenance Work at the Die Attach Unit .................................................................... 47
Cleaning the Driver and Checking for Ease-of-Movement ...................................................................... 47
Checking the Nozzle Attachment at Die-Attach-Modul for Leaks .......................................................... 48
Checking the Suction Plates (Membran) at the Nozzle Take-Up for Leaks ........................................... 52
Lubricating the Retract Unit and Checking for Ease-of-Movement ....................................................... 53
Checking the Vacuum Part for Leaks ........................................................................................................ 53
Maintenance Work at the Elastic Couplings of the Spindle Drives ........................... 55
Checking the Couplings at the Wafer Table .............................................................................................. 55
Checking the Coupling at the Gripper ...................................................................................................... 56
Checking the Coupling of the Magazine Lift ............................................................................................. 56