00195963-03_MM SWS-EN - 第32页
Cleanin g the Vacuum Cap an d Checkin g the Eject or Needle New System Magnet Interval Monthly or if necessar y Equipment Compress ed air, lint - free cl oth, ethyl alco hol if necessa ry In order to assure pr oper suc…
31
Cleaning the Vacuum Cap and Checking the Ejection Needle
Cleaning the Vacuum Cap and Checking the Ejector Needle Old System Bayonett
Interval Monthly or if necessary
Equipment Compressed air, lint-free cloth, ethyl alcohol if necessary
In order to assure proper suction of the wafer foil, the vacuum cap of the needle system must be
free of dirt and small wafer pieces.
Turn the rotary locking clockwise and lift off the needle system.
Legend
[1] Vacuum cap
Remove the vacuum cap from the needle
kit (1-).
Hold the cap against the light and check if
the vacuum openings of the cap are free.
Clean the cap with a lint-free cloth of, if
necessary with compressed air.
The ring shaped openings must be free of
dirt.
Legend
[2] Ejection needle
Check the ejection needle for breakage or
wear.
If necessary, the needle must be replaced
and afterwards adjusted by means of the
adjustment tool (see the User Manual for
details).
Replace the vacuum cap.
Cleaning the Vacuum Cap and Checking the Ejector Needle New System Magnet
Interval Monthly or if necessary
Equipment Compressed air, lint-free cloth, ethyl alcohol if necessary
In order to assure proper suction of the wafer foil, the vacuum cap of the needle system must be
free of dirt and small wafer pieces.
Turn the rotary locking clockwise and lift off the needle system.
Legend
[1] Vacuum cap
Remove the vacuum cap from the needle
kit (1-).
Hold the cap against the light and check if
the vacuum openings of the cap are free.
Clean the cap with a lint-free cloth of, if
necessary with compressed air.
The ring shaped openings must be free of
dirt.
Legend
[2] Ejection needle
Check the ejection needle for breakage or
wear.
If necessary, the needle must be replaced
and afterwards adjusted by means of the
adjustment tool (see the User Manual for
details).
Replace the vacuum cap.
33
Cleaning the Magnets and Ceramic Spheres of the Needle System
Interval: 3-month
Equipment
:
Lint-free cloth, ethyl alcohol, cleaning buds, lint-free
Dirt on the magnets and the ceramic spheres on the underside of the needle system must be re- moved
regularly, to ensure the correct positioning of the needle system within the centering unit.
Legend
[1] Ceramic spheres
[2] Magnets
Wipe the magnets and the ceramic spheres with a lint-free cloth.
Clean the surfaces with a cleaning bud moistened with ethyl alcohol.
Cleaning the Prism and the Magnetic Contact Surfaces at the Centering Unit
Interval: 3 months
Equipment: Lint-free cloth, ethyl alcohol, cleaning buds, lint-free
Dirt on the magnets and the prisms on the underside of the centering unit must be removed reg-
ularly, to ensure the correct positioning of the needle system within the centering unit.