00195963-03_MM SWS-EN - 第41页

41 1 Checking the Rotary Locking for Ease - of - Movement Interval: 6 months Equipment: None The rotary locking tha t fixes the the nee dle system mus t be eas ily rotatabl e. The n eedle system inserted must be plac ed …

Lubricating the Shaft for the Z Movement at the Needle System

Interval: 4 months

Equipment: Spray grease (aerosol)

The shaft for the Z movement (ejection) must be easily movable by hand in its bronze guide and

should therefore be lubricated regularly.

Legend

[1] Lubrication point

 Slightly move the Z shaft out of its bronze guide.

 Spray a bit of spray grease on the lubrication points shown [1].

Checking the Rotary Locking for Ease-of-Movement

Interval: 6 months

Equipment: None

The rotary locking that fixes the the needle system must be easily rotatable. The needle system

inserted must be placed securely in the locking.

Legend

[1] Rotary locking open

[2] Rotary locking with fixed suppression pin

 Check, if the rotary locking is free of debris and clean it if necessary.

 Vertically, insert the needle system into the rotary locking.

 Turn the rotary locking counterclockwise, until the suppression pin is fixed correctly [2].

Checking the Die Ejector for Vacuum leaks

Interval: 6 months

Equipment: SWS GUI

In order to exclude a vacuum loss at the die ejector, its vacuum value must be checked regularly.

CAUTION

For this check the Service user level is required in SWS GUI. Only appropriately trained personal

is allowed to carry out this check.

- SWS must be referenced.

- Move the wafertable in the Changeposition (s. Kap.2.8.1).

- Move the die ejector in Up-position (s. Kap.2.8.2).

- Open any cover from the CA-Placement machine, to get access to the SWS

The power supply to the gantry axes and the SWS axes is interrupted immediately. The gantry

axes and all SWS axes will come to a standstill. A corresponding message is issued on the

screen. Skip the message.

 Change to Menu Manual operations [1] -> Manual operations subsystems [2] -> IOs [3]

(see screenshot below)

 Change to Menu Manual operations USBIO [1] and select folder USB outputs [2] (see

screenshot below) and switch off all parts consuming vaccum (Dxx Vacuum …) by using OFF

buttons (see. 3), in case one of these Outputs is active. This has to be done also for all air

supply consumer outputs. (Dxx Pressure ...) (s. 3).