00195963-03_MM SWS-EN - 第5页
5 Maint enance Wor k at the Flip Unit ............................................................................... 57 C leaning the R aceway an d the Retra ct Unit .....................................................…
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General Maintenance Work .......................................................................................... 25
Emptying Reject Bin and Vacuuming the Nozzle Changer ..................................................................... 25
Checking the Exhaust Air Pressure Manometer for Die Attach and Flip Unit ....................................... 26
Visual Check and Cleaning of the Machine Interior ................................................................................. 27
Checking the Energy Chain for Ease-of-Movement and the Correct Position of the Latches ............... 27
Maintenance Work at the Die Ejector ........................................................................... 28
Moving the Wafer Table into Wafer Change Position ............................................................................... 28
Cleaning the Vacuum Cap and Checking the Ejection Needle ............................................................... 31
Cleaning the Magnets and Ceramic Spheres of the Needle System ...................................................... 33
Cleaning the Prism and the Magnetic Contact Surfaces at the Centering Unit ....................................... 33
Checking the Suppression Pins of the Needle System ........................................................................... 34
Checking the Sealing Ring at the Needle System and the Centering Unit for Leaks ............................. 35
Lubricating the Shaft for the Z Movement at the Needle System ........................................................... 40
Checking the Rotary Locking for Ease-of-Movement.............................................................................. 41
Checking the Die Ejector for Vacuum leaks ............................................................................................. 42
Cleaning the Linear Guide of the Die Ejector ........................................................................................... 46
Maintenance Work at the Die Attach Unit .................................................................... 47
Cleaning the Driver and Checking for Ease-of-Movement ...................................................................... 47
Checking the Nozzle Attachment at Die-Attach-Modul for Leaks .......................................................... 48
Checking the Suction Plates (Membran) at the Nozzle Take-Up for Leaks ........................................... 52
Lubricating the Retract Unit and Checking for Ease-of-Movement ....................................................... 53
Checking the Vacuum Part for Leaks ........................................................................................................ 53
Maintenance Work at the Elastic Couplings of the Spindle Drives ........................... 55
Checking the Couplings at the Wafer Table .............................................................................................. 55
Checking the Coupling at the Gripper ...................................................................................................... 56
Checking the Coupling of the Magazine Lift ............................................................................................. 56
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Maintenance Work at the Flip Unit ............................................................................... 57
Cleaning the Raceway and the Retract Unit ............................................................................................. 57
Checking the Rotary Part for Ease-of-Movement .................................................................................... 58
Checking the Nozzle Attachment for Leaks ............................................................................................. 58
Checking the Suction Plates at the Nozzle Take-Up for Leaks ............................................................... 63
Check reject bins ......................................................................................................................................... 63
Lubricating the Linear Guides from Rotary Part ...................................................................................... 64
Checking Connected Cables and Lines .................................................................................................... 65
Maintenance Work at the Gripper ................................................................................ 66
Cleaning the Gripper Jaws ......................................................................................................................... 66
Cleaning the Guide Rail .............................................................................................................................. 66
Lubricating Bearings and Driver Groove at the Sensor Lever ............................................................... 67
Lubricating or Cleaning the Z Guide ......................................................................................................... 67
Maintenance Work at the Magazine Lift ....................................................................... 69
Vacuuming the Magazine Support Plate ................................................................................................... 69
Cleaning the Frame Sensor ........................................................................................................................ 69
Cleaning Z Guides and Z Spindle .............................................................................................................. 70
Cleaning the Guide of the Sliding Door .................................................................................................... 71
Maintenance Work at the PC ........................................................................................ 72
Cleaning the PC Filter ................................................................................................................................. 72
Checking the PC Fan for Correct Function .............................................................................................. 72
Maintenance Work at the Vacuum System .................................................................. 73
Checking Vacuum Performance and Suction ........................................................................................... 73
Checking the Valves for Leaks ................................................................................................................... 73
Exchanging the Membrane of the Vacuum Pump .................................................................................... 74
6
Maintenance Work at the Wafer Changer .................................................................... 75
Cleaning the Guide Rail of the Gripper ..................................................................................................... 75
Maintenance Work at the Wafer Table .......................................................................... 76
Cleaning the Supporting Rails for the Wafer Frames .............................................................................. 76
Checking the O-Rings at the Wafer Support for Leaks ........................................................................... 76
Cleaning the Optical Sensors .................................................................................................................... 77
Cleaning the X / Y Linear Guides and the Spindles ................................................................................. 78