00195963-03_MM SWS-EN - 第54页
Procedur e Approva l of Vacuum : 1. Manually activation of vacu um valve an d check, if the cor rect segment is under v acuum DieAtta ch Venti l Y6 2. Electronic Control v ia USB - IO and contr ol from v acuum s ensors…
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Lubricating the Retract Unit and Checking for Ease-of-Movement
Interval: 4 months
Equipment: Oil dispenser with Structovis GH
)
Legend
[1-3] Lubrication points at the retract mecha-
nism
Lubricate the retract mechanism at the
points shown (items 1 - 3). If necessary,
use a cleaning bud to apply the spray
grease precisely.
Manually, pull the retract mechanism back.
It must be easily movable.
Checking the Vacuum Part for Leaks
Interval: Yearly
Equipment:
Vacuum
Legend
[1] Suction plate at the die attach head
[2] Vacuum connection
Switch on the vacuum and check the vac-
uum connection for leaks. Observe any
blowing noise.
Procedure Approval of Vacuum:
1. Manually activation of vacuum valve and check, if the correct segment is under vacuum
DieAttach Ventil Y6
2. Electronic Control via USB-IO and control from vacuum sensors (in SW goto manual operation->subsysteme-
>IOs->Flipper and DieAttach).
Switch Outputs DO6 und DO5 on-off in single steps
Check, if there is Vacuum or Air-Kiss on the segment
Check, if the values DieAttach (AI6) are changing
o Value switched off ~400-415
o Activated Air-kiss ~65-80 sein
o Activated Vaccum at Segment ~1250-1300; with both Segments ~1020-1050
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Maintenance Work at the Elastic Couplings of the Spindle Drives
The elastic couplings at the spindle drives must regularly be checked for signs of wear and correct
function.
Checking the Couplings at the Wafer Table
Interval: 6 months
Equipment:
Hexagon socket spanner 2.5
The wafer table is equipped with one X and one Y coupling.
X coupling at the wafer table Y coupling at the wafer table
Legend
[1] Fastening screw
[2] Protective boot
Check all fastening screws for secure seat and fasten them, if necessary.