00195963-03_MM SWS-EN - 第55页
55 M ain ten ance Wo rk at th e El asti c Cou pli ng s of the S pindle Drives The ela stic coupli ngs at the spind le drives must regular ly be chec ked for signs of wear and corr ect function. Checking the Coupl ings at…
Procedure Approval of Vacuum:
1. Manually activation of vacuum valve and check, if the correct segment is under vacuum
DieAttach Ventil Y6
2. Electronic Control via USB-IO and control from vacuum sensors (in SW goto manual operation->subsysteme-
>IOs->Flipper and DieAttach).
Switch Outputs DO6 und DO5 on-off in single steps
Check, if there is Vacuum or Air-Kiss on the segment
Check, if the values DieAttach (AI6) are changing
o Value switched off ~400-415
o Activated Air-kiss ~65-80 sein
o Activated Vaccum at Segment ~1250-1300; with both Segments ~1020-1050
55
Maintenance Work at the Elastic Couplings of the Spindle Drives
The elastic couplings at the spindle drives must regularly be checked for signs of wear and correct
function.
Checking the Couplings at the Wafer Table
Interval: 6 months
Equipment:
Hexagon socket spanner 2.5
The wafer table is equipped with one X and one Y coupling.
X coupling at the wafer table Y coupling at the wafer table
Legend
[1] Fastening screw
[2] Protective boot
Check all fastening screws for secure seat and fasten them, if necessary.
Checking the Coupling at the Gripper
Interval: 6 months
Equipment:
Hexagon socket spanner 1.5
The coupling at the gripper is covered by a plate.
Legend
[1] Cover plate of the coupling
[2] Openings above the fastening screws
Manually, turn the coupling into a position,
where you can access the fastening
screws through the openings.
If necessary, tighten the fastening screws.
Checking the Coupling of the Magazine Lift
Interval: 6 months
Equipment:
Hexagon socket spanner 2.5
The coupling for the Z direction is located at the bottom of the magazine lift.
If necessary, tighten the fastening screws.
Check the protective boot for signs of rup-
ture. In case of damage, the coupling must
be exchanged.