00195963-03_MM SWS-EN - 第56页
Checking the Coupl ing at the Gripp e r Interval: 6 months Equipment: Hexagon s ocket span ner 1. 5 The coup ling at the gr ipper is covered by a plat e. Legend [1] Cover plate of th e coupling [2] Openi ngs above th e f…
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Maintenance Work at the Elastic Couplings of the Spindle Drives
The elastic couplings at the spindle drives must regularly be checked for signs of wear and correct
function.
Checking the Couplings at the Wafer Table
Interval: 6 months
Equipment:
Hexagon socket spanner 2.5
The wafer table is equipped with one X and one Y coupling.
X coupling at the wafer table Y coupling at the wafer table
Legend
[1] Fastening screw
[2] Protective boot
Check all fastening screws for secure seat and fasten them, if necessary.
Checking the Coupling at the Gripper
Interval: 6 months
Equipment:
Hexagon socket spanner 1.5
The coupling at the gripper is covered by a plate.
Legend
[1] Cover plate of the coupling
[2] Openings above the fastening screws
Manually, turn the coupling into a position,
where you can access the fastening
screws through the openings.
If necessary, tighten the fastening screws.
Checking the Coupling of the Magazine Lift
Interval: 6 months
Equipment:
Hexagon socket spanner 2.5
The coupling for the Z direction is located at the bottom of the magazine lift.
If necessary, tighten the fastening screws.
Check the protective boot for signs of rup-
ture. In case of damage, the coupling must
be exchanged.
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Maintenance Work at the Flip Unit
To get access to the flip unit, first remove the EMC cover and then the cover above the flip head.
Remove the six hexagon socket screws fixing the EMC cover and lift the cover off.
Remove the two hexagon socket screws fixing the cover above the flip head and lift the cover
off.
Carry out the required tasks.
After completing your work, replace the covers and fix them.
Magnetic field warning
The flip unit contains a strong magnet. Make sure, that no metallic objects get into the vicinity of
the flip unit, since they are attracted by the magnet.
– Do not carry out any tasks at the flip unit exceeding the maintenance work. In case of a defect
the flip unit is replaced as a whole.
Cleaning the Raceway and the Retract Unit
Interval: Weekly
Equipment:
Ethyl alcohol, cleaning buds, lint-free
Legend
[1] [1] Crank
[2] Rotary part
[3] Cleaning buds
Clean the crank [1] around the rotary part
[2] with a cleaning bud or with cleaning bud
moistened with ethyl alcohol.