00195963-03_MM SWS-EN - 第6页
6 Maint enance Wor k at the Waf er Changer .................................................................... 75 Cleaning the Guide Rail of the Gr ipper .................................................................…
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Maintenance Work at the Flip Unit ............................................................................... 57
Cleaning the Raceway and the Retract Unit ............................................................................................. 57
Checking the Rotary Part for Ease-of-Movement .................................................................................... 58
Checking the Nozzle Attachment for Leaks ............................................................................................. 58
Checking the Suction Plates at the Nozzle Take-Up for Leaks ............................................................... 63
Check reject bins ......................................................................................................................................... 63
Lubricating the Linear Guides from Rotary Part ...................................................................................... 64
Checking Connected Cables and Lines .................................................................................................... 65
Maintenance Work at the Gripper ................................................................................ 66
Cleaning the Gripper Jaws ......................................................................................................................... 66
Cleaning the Guide Rail .............................................................................................................................. 66
Lubricating Bearings and Driver Groove at the Sensor Lever ............................................................... 67
Lubricating or Cleaning the Z Guide ......................................................................................................... 67
Maintenance Work at the Magazine Lift ....................................................................... 69
Vacuuming the Magazine Support Plate ................................................................................................... 69
Cleaning the Frame Sensor ........................................................................................................................ 69
Cleaning Z Guides and Z Spindle .............................................................................................................. 70
Cleaning the Guide of the Sliding Door .................................................................................................... 71
Maintenance Work at the PC ........................................................................................ 72
Cleaning the PC Filter ................................................................................................................................. 72
Checking the PC Fan for Correct Function .............................................................................................. 72
Maintenance Work at the Vacuum System .................................................................. 73
Checking Vacuum Performance and Suction ........................................................................................... 73
Checking the Valves for Leaks ................................................................................................................... 73
Exchanging the Membrane of the Vacuum Pump .................................................................................... 74
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Maintenance Work at the Wafer Changer .................................................................... 75
Cleaning the Guide Rail of the Gripper ..................................................................................................... 75
Maintenance Work at the Wafer Table .......................................................................... 76
Cleaning the Supporting Rails for the Wafer Frames .............................................................................. 76
Checking the O-Rings at the Wafer Support for Leaks ........................................................................... 76
Cleaning the Optical Sensors .................................................................................................................... 77
Cleaning the X / Y Linear Guides and the Spindles ................................................................................. 78
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Safety Instructions
Location of Switches and Buttons at the SWS
Fig. 1.1 - 1 Location of switches and buttons at the SWS
[1] Operating status indicator [2] EMERGENCY STOP button
[3] Main power switch
Always follow the safety and accident prevention regulations applicable in your country when
carrying out any maintenance work.
Follow the safety instructions in the corresponding User Manual.
In addition, pay particular attention to the special safety instructions in this chapter.