00195963-03_MM SWS-EN - 第7页
7 S afety Instr uctions Locat ion of Switches and Bu ttons at the SWS Fig. 1 .1 - 1 Location of switches and buttons at t he S WS [1] Operat ing status i ndicat or [2] EMER GENCY ST OP button [3] Main pow er switch Alw…
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Maintenance Work at the Wafer Changer .................................................................... 75
Cleaning the Guide Rail of the Gripper ..................................................................................................... 75
Maintenance Work at the Wafer Table .......................................................................... 76
Cleaning the Supporting Rails for the Wafer Frames .............................................................................. 76
Checking the O-Rings at the Wafer Support for Leaks ........................................................................... 76
Cleaning the Optical Sensors .................................................................................................................... 77
Cleaning the X / Y Linear Guides and the Spindles ................................................................................. 78
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Safety Instructions
Location of Switches and Buttons at the SWS
Fig. 1.1 - 1 Location of switches and buttons at the SWS
[1] Operating status indicator [2] EMERGENCY STOP button
[3] Main power switch
Always follow the safety and accident prevention regulations applicable in your country when
carrying out any maintenance work.
Follow the safety instructions in the corresponding User Manual.
In addition, pay particular attention to the special safety instructions in this chapter.
Conventions for the Use of Hazard Symbols
This manual contains notes that must be observed to guarantee your personal safety and to avoid
damage to equipment. These notes are highlighted by warning triangles and are indicated as fol-
lows according to the level of risk:
DANGER
as used in this manual means that death, severe injury or considerable damage to equipment
will occur if the danger instructions are not followed.
WARNING
as used in this manual means that death, severe injury or considerable damage to equipment
may occur if the warning instructions are not followed.
CAUTION
as used in this manual means that slight injury or damage to equipment may occur if the caution
instructions are not followed.
NOTE
as used in this manual provides information on the product or indicates a part of the manual that
requires particular attention.
General Safety Instructions for Maintenance Work
DANGER
There is a risk for personnel and equipment if the safety instructions are not followed!
Please observe the safety instructions in the relevant User Manual when carrying out work on the
machine.