00195963-03_MM SWS-EN - 第75页
75 M ain ten ance Wo rk at the Wafer Changer Cleaning the G uide R ail of the Gripper NOTE The guid e rail of th e gripper has got a lif etime lubr ication, s o that it is only necess ary to c lean it. Interval: 1 month …
Exchanging the Membrane of the Vacuum Pump
To make the vacuum pump accessible, you have to swivel open the magazine lift (See ”Swiv-
eling out the Magazine Lift” on page - 14.) and pull out the supply unit (See ”Pulling out the
Supply Unit” on page - 15.).
Interval: 1 year
Equipment:
Damper and Membrane from Servicebox
Legend
[1] Damper
[2] Membrane
Replace the membrane of the vacuum
pump according to the manufacturer's in-
structions.
75
Maintenance Work at the Wafer Changer
Cleaning the Guide Rail of the Gripper
NOTE
The guide rail of the gripper has got a lifetime lubrication, so that it is only necessary to clean it.
Interval: 1 month
Equipment:
SIPLACE cleaning tissue
Legend
[1] Gripper rail
[2] Carrier
Wipe the gripper rail with a SIPLACE
cleaning tissue.
Maintenance Work at the Wafer Table
Cleaning the Supporting Rails for the Wafer Frames
Interval: Weekly
Equipment:
Ethyl alcohol, lint-free cloth
Legend
[1] Wafer support rail
Clean the support rails for the wafer frames
with a lint-free cloth moistened with ethyl
alcohol.
Check for spots of abrasion and signs of
wear.
Checking the O-Rings at the Wafer Support for Leaks
The O-rings under the wafer locking bar should be checked for leaks, if necessary, e. g. in case
of frequent product changes.
Interval: If necessary
Equipment:
If necessary new O rings and UNISILIKON L250
Legend
[1] Fastening nut for the wafer locking bar
[2] O ring