00195963-03_MM SWS-EN - 第76页

M ain ten ance Wo rk at the Wa fer Table Cleaning the S upporting Rails for the Wafe r Frames Interval: Weekly Equipment: Ethyl alc oho l, lint - free c loth Legend [1] Wafer su pport ra il  Clean th e support ra ils fo…

Maintenance Work at the Wafer Changer

Cleaning the Guide Rail of the Gripper

NOTE

The guide rail of the gripper has got a lifetime lubrication, so that it is only necessary to clean it.

Interval: 1 month

Equipment:

SIPLACE cleaning tissue

Legend

[1] Gripper rail

[2] Carrier

 Wipe the gripper rail with a SIPLACE

cleaning tissue.

Maintenance Work at the Wafer Table

Cleaning the Supporting Rails for the Wafer Frames

Interval: Weekly

Equipment:

Ethyl alcohol, lint-free cloth

Legend

[1] Wafer support rail

 Clean the support rails for the wafer frames

with a lint-free cloth moistened with ethyl

alcohol.

 Check for spots of abrasion and signs of

wear.

Checking the O-Rings at the Wafer Support for Leaks

The O-rings under the wafer locking bar should be checked for leaks, if necessary, e. g. in case

of frequent product changes.

Interval: If necessary

Equipment:

If necessary new O rings and UNISILIKON L250

Legend

[1] Fastening nut for the wafer locking bar

[2] O ring

 Remove the fastening nut [1] of the wafer locking bar and lift off the wafer locking bar.

 Take out the two O rings and check them for signs of damage or wear.

If necessary, the O rings must be exchanged and lubricated afterwards with UNISILIKON

L250 (see the Service Manual for further details).

 Re-insert the O rings.

 Refit the wafer locking bar and fasten it, using the fastening nut.

Cleaning the Optical Sensors

CAUTION

Never use a solvent for cleaning the sensors, to prevent the plastic surface from being damaged.

Interval: Monthly

Equipment:

optical cloth

Legend

[1] Optical sensor

 Clean the sensors with an optical cloth.