00195963-03_MM SWS-EN - 第77页
77 Remove the fasten ing nut [1] of t he wafer loc king bar and lift off th e wafer l ocking bar. Take out the two O ri ngs and chec k them f or signs of da mage or w ear. If necess ary, the O r ings mus t be exchang…
Maintenance Work at the Wafer Table
Cleaning the Supporting Rails for the Wafer Frames
Interval: Weekly
Equipment:
Ethyl alcohol, lint-free cloth
Legend
[1] Wafer support rail
Clean the support rails for the wafer frames
with a lint-free cloth moistened with ethyl
alcohol.
Check for spots of abrasion and signs of
wear.
Checking the O-Rings at the Wafer Support for Leaks
The O-rings under the wafer locking bar should be checked for leaks, if necessary, e. g. in case
of frequent product changes.
Interval: If necessary
Equipment:
If necessary new O rings and UNISILIKON L250
Legend
[1] Fastening nut for the wafer locking bar
[2] O ring
77
Remove the fastening nut [1] of the wafer locking bar and lift off the wafer locking bar.
Take out the two O rings and check them for signs of damage or wear.
If necessary, the O rings must be exchanged and lubricated afterwards with UNISILIKON
L250 (see the Service Manual for further details).
Re-insert the O rings.
Refit the wafer locking bar and fasten it, using the fastening nut.
Cleaning the Optical Sensors
CAUTION
Never use a solvent for cleaning the sensors, to prevent the plastic surface from being damaged.
Interval: Monthly
Equipment:
optical cloth
Legend
[1] Optical sensor
Clean the sensors with an optical cloth.
Cleaning the X / Y Linear Guides and the Spindles
NOTE
The X and Y linear guides as well as the X and Y spindles of the wafer table have got a lifetime
lubrication, so that it is only necessary to clean them.
Interval: 1 month
Equipment:
SIPLACE cleaning tissue
X linear guide and X spindle Y linear guide and Y spindle
Legend
[1] Spindle at the wafer table
[2] Linear guide at the wafer table
Wipe the whole length of the spindles and the linear guides of the wafer table with a SIPLACE
cleaning tissue.