SP22P Mechanical20091001 - 第169页

1 18B4C061010 COVER 1 2 18B4C061020 BRACKET 2 3 18B4C061030 PLATE 1 4 KXF078CAA00 PUMP DOP-80SKMA 1 A 5 KXF01DAAA00 ADJUSTER C-280-4 4 6 KXF04UFAA00 NUT Hexagon nut M10 1-type 4 7 KXF02CKAA00 JOINT KQL12-02S 2 8 KXF03VCA…

1 18B4C061010 COVER 1

2 18B4C061020 BRACKET 2

3 18B4C061030 PLATE 1

4 KXF078CAA00 PUMP DOP-80SKMA 1 A

5 KXF01DAAA00 ADJUSTER C-280-4 4

6 KXF04UFAA00 NUT Hexagon nut M10 1-type 4

7 KXF02CKAA00 JOINT KQL12-02S 2

8 KXF03VCAA00 TUBE TU1208B-20 1

9 KXF055ZAA00 NIPPLE Nipple 1/4 1

10 KXF07N3AA00 ELBOW Female/male elbow 1/4 1

11 KXF04ETAA00 SCREW Cross recessed truss head screw M4×8L 4

12 KXF06FGAA00 FILTER F150-02 1

13 KXF06FHAA00 MUFFLER KM-23 1

14 KXF01A8AA00 SPACER BSU-408 4

15 KXF06T7AA00 BOLT ME-15 4

16 KXF04BGAA00 WASHER Thick washer for M5 8

17 KXF04VCAA00 NUT Hexagon nut M5 1-type 4

番号

ＭＯ機番

ユニット名称

基板吸着U(真空ﾎﾟﾝﾌﾟ):SP20P-MA1

UNIT NAME

PART NUMBER

品番部品名型式数量ﾗﾝｸ備考

Board pick-up unit(vacuum pump):SP20-

PART LIST

MODULE NUMBER

パーツリスト

18B4C0M0000

3-A

UNIT NUMBER

ユニットＮｏ.

PART NAME TYPE Q'TY RANK REMARKS

− −12 02 0000−（）