SP22P Mechanical20091001 - 第170页

在线预览 SP22P Mechanical20091001 PDF 文档。

1 18B4C061010 COVER 1

2 18B4C061020 BRACKET 2

3 18B4C061030 PLATE 1

4 KXF078CAA00 PUMP DOP-80SKMA 1 A

5 KXF01DAAA00 ADJUSTER C-280-4 4

6 KXF04UFAA00 NUT Hexagon nut M10 1-type 4

7 KXF02CKAA00 JOINT KQL12-02S 2

8 KXF03VCAA00 TUBE TU1208B-20 1

9 KXF055ZAA00 NIPPLE Nipple 1/4 1

10 KXF07N3AA00 ELBOW Female/male elbow 1/4 1

11 KXF04ETAA00 SCREW Cross recessed truss head screw M4×8L 4

12 KXF06FGAA00 FILTER F150-02 1

13 KXF06FHAA00 MUFFLER KM-23 1

14 KXF01A8AA00 SPACER BSU-408 4

15 KXF06T7AA00 BOLT ME-15 4

16 KXF04BGAA00 WASHER Thick washer for M5 8

17 KXF04VCAA00 NUT Hexagon nut M5 1-type 4

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25

26

27

28

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30

NO

番号

ＭＯ機番

ユニット名称

基板吸着U(真空ﾎﾟﾝﾌﾟ):SP20P-MA1

UNIT NAME

PART NUMBER

品番部品名型式数量ﾗﾝｸ備考

Board pick-up unit(vacuum pump):SP20-

PART LIST

MODULE NUMBER

パーツリスト

18B4C0M0000

3-A

UNIT NUMBER

ユニットＮｏ.

PART NAME TYPE Q'TY RANK REMARKS

− −12 02 0000−（）

1 18B4C011010 BLOCK 1

2 18B4C011021 PLATE 1

3 18B4C061040 BRACKET 1

4 18B4C061051 BRACKET 1

5 KXF02C7AA00 JOINT KQL08-01S 3

6 KXF02C9AA00 JOINT KQL08-02S 3

7 KXF05K3AA00 PLUG MSWT2 1

8 KXF09FFAA00 FILTER ZFA200-02 1

9 KXF0A38AA00 SENSOR AP-31 1

10 KXF07CVAA00 JOINT KQT08-02S 1

11 KXF02C1AA00 JOINT KQL06-08 1

12 KXF02BXAA00 JOINT KQL06-01S 1

13 KXF02C3AA00 JOINT KQL06-M5 1

14 KXF00WEAA00 SILENCER AN203-02 1

15 KXF0A39AA00 VALVE VP342-5GZ-F 1

16 KXF00WCAA00 SILENCER AN120-M5 1

17 KXF02ANAA00 JOINT KQE12-00 1

18 KXF03UQAA00 TUBE TU0805B-20 1

19 KXF03TZAA00 TUBE TU0604B(2m) 1

20 KXF09W7AA00 ELBOW Female/male elbow 1 1

21 KXF04ZPAA00 ELBOW Elbow 1 1/4 1

22

23

24

25

26

27

28

29

30

NO

番号

ＭＯ機番

ユニット名称

基板吸着U(真空ﾎﾟﾝﾌﾟ):SP20P-MA1

UNIT NAME

PART NUMBER

品番部品名型式数量ﾗﾝｸ備考

Board pick-up unit(vacuum pump):SP20-

PART LIST

MODULE NUMBER

パーツリスト

18B4C0M0000

3-B

UNIT NUMBER

ユニットＮｏ.

PART NAME TYPE Q'TY RANK REMARKS

− −14 04 0000−（）